A vacuum storage and testing device for transmission electron microscope sample rod

A technology for transmission electron microscope samples and sample rods, which is applied in the direction of measuring devices, vacuum gauges, circuits, etc., can solve problems such as pollution, contamination of transmission electron microscope parts, and the time to pre-vacuumize the vacuum system of the transmission electron microscope.

CN106783494BActive Publication Date: 2018-07-06BEIJING UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2018-07-06

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Abstract

A vacuum storing and testing device for transmission electron microscope sample rods belongs to the field of transmission electron microscope vacuum fittings. In storage of the sample rods, energizing testing and heating testing can be performed on the sample rods. The device comprises the components of a movable frame, a vacuum pump system, a vacuum measuring-and-displaying system, a vacuum cap, a valve system, a sample rod storing assembly and a plug. The device realizes simultaneous storage of multiple sample rods and is provided with an adding window which is reserved. The device can pump the air pressure in a chamber from atmosphere pressure to 4*10<-4> Pa within five minutes, and a limit vacuum pressure can reach 5*10<-5> Pa. The vacuum storing and testing device has advantages of effectively preventing electron microscope pollution caused by pollution or erosion by the sample rods in placement at outside, greatly reducing pre-pumping time of the sample rods in the electron microscope, realizing higher speed in reaching a stable vacuum degree of the electron microscope and prolonging service life of the sample rods. The vacuum storing and testing device further realizes benefits of convenient operation, high vacuum degree, easy adding of sample rod storing stations, and high suitability for different types of transmission electron microscope sample rods.
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Description

Technical field:

[0001] The invention relates to a vacuum storage and testing device for a transmission electron microscope sample rod, which is used for pre-vacuumizing and storing the transmission electron microscope sample rod, and performing pretreatment on the transmission electron microscope sample before entering the electron microscope, so as to ensure that the sample rod and the sample are dry and clean, shorten the The pre-extraction time of the transmission electron microscope reduces the pollution of the sample rod to the transmission electron microscope and improves the service life of the sample rod. In this device, the sample rod of the transmission electron microscope can also be energized, heated and other debugging tests in a working vacuum environment. The invention belongs to the field of transmission electron microscope vacuum accessories. Background technique:

[0002] Since the invention of the transmission electron microscope in the 1930s, especially ...

Examples

Embodiment Construction

[0040] The present invention is further described below with reference to the accompanying drawings, in which exemplary embodiments of the invention are illustrated. However, the present invention can be embodied in many different forms, and the function of the device can also be realized by changing the structural form of the device or the shape of the sample holder storage assembly, and is not limited to the examples described herein.

[0041] When using for the first time, insert the sample rods 19 into the corresponding stations in turn. When the number of sample rods 1 is not enough, the plugs 7 can be used to replace the sample rods 19, so as to ensure that the device of the present invention is a closed container. Open the dry scroll pump 4 and the fore valve 3, pump the molecular pump 2 to a low vacuum, open the molecular pump 2, and after the molecular pump 2 works, close the fore valve 3 and open the pre-pump valve 5. When the sample rod is stored in the assembly Whe...