Manipulator and transfer chamber
A technology of manipulators and mechanical fingers, which is applied in the field of manipulators and transmission chambers, can solve the problems of large volume of transmission chambers and increase equipment production costs, and achieve the effect of reducing its own volume, volume, and production costs
Active Publication Date: 2019-10-11
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
[0006] Since the longest moving distance of the mechanical finger in one direction is the length of the guide rail of the linear module, in order to meet the moving distance required by the mechanical finger to complete the film loading operation, the length of the guide rail of the linear module is longer, resulting in the volume of the transmission chamber. Larger, which in turn increases the production cost of the equipment
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[0032] In order to enable those skilled in the art to better understand the technical solution of the present invention, the manipulator and the transport chamber provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0033] Please also refer to Figures 2A-2C , the manipulator provided by the present invention includes a mechanical finger 100 and a linear transmission mechanism, wherein the mechanical finger 100 is used to carry the workpiece to be processed; group 300 and the secondary linear module 200, wherein the primary linear module 300 is used to drive the secondary linear module 200 for linear reciprocating motion, and the secondary linear module 200 is located at the beginning of the stroke of the primary linear module 300 A1 (ie, the starting point of movement of the secondary linear module 200 when driven by the primary linear module 300 ) overlaps with it. The secondary linear module 200 is used to drive...
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The invention provides a manipulator and a transmission chamber, comprising: a manipulator finger and a linear transmission mechanism. The manipulator is used to carry a to-be-processed workpiece; the linear transmission mechanism is used to drive the manipulator for straight reciprocating motion. The linear transmission mechanism comprises a first-order linear module and a second-order linear module wherein the first-order linear module is used to drive the second-order linear module for straight reciprocating motion and the second-order linear module overlaps the first-order linear module when the second-order linear module is located at the stroke starting end of the first-order linear module. The second-order linear module is used to drive the manipulator finger for straight reciprocating motion and the manipulator finger overlaps the second-order linear module when the manipulator finger is located at the stroke starting end of the second-order linear module. The straight reciprocating motion of the manipulator finger is realized on the same straight line as the straight reciprocating motion of the second-order linear module. The manipulator finger provided by the invention, under the condition that the motion distance required by the manipulator finger to complete the piece placing operation is satisfied, is small in size, which further reduces the size of the transmission chamber and the equipment manufacturing cost.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a manipulator and a transmission chamber. Background technique [0002] In the etching process in the fields of integrated circuits, semiconductor lighting, micro-electromechanical systems, etc., in order to improve the automation and safety of equipment, manipulators are usually used to automatically complete the transfer of processed workpieces such as wafers. [0003] Existing semiconductor processing equipment mainly includes a transfer chamber and a process chamber connected by valves, wherein a manipulator is installed in the transfer chamber. Before the process, the transfer chamber is in an atmospheric state, and the wafer is placed on the finger of the manipulator at this time; then, the transfer chamber is evacuated, and the valve between the transfer chamber and the process chamber is opened to carry the The manipulator of the wafer moves into the process ch...
Claims
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IPC IPC(8): H01L21/677
Inventor 张新云
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD