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Magneto-optic plasma biosensor

A biosensor and plasma technology, applied in the field of optical sensing, can solve the problem that the resolution of the device cannot be further improved, and achieve the effect of novel structure, stable material and large modulation ability

Inactive Publication Date: 2017-06-13
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

However, due to the large loss of the ferromagnetic metal itself, the resolution of the device cannot be further improved.

Method used

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Embodiment Construction

[0018] see figure 1 , 2 .

[0019] The magneto-optic plasma biosensor of the present invention selects silicon dioxide prisms, and deposits a multilayer film of titanium nitride / silicon dioxide / yttrium iron garnet / cerium-doped yttrium iron garnet / gold on a silicon dioxide substrate by laser pulse deposition device.

[0020] The present invention sets the thickness of each layer between the substrate and the gold layer as follows: titanium nitride 44nm, silicon dioxide 15nm, yttrium iron garnet 52nm, cerium-doped yttrium iron garnet 48nm, gold 10nm. 39600RIU at 650nm wavelength incident light -1 Theoretical figure of merit for the size. When the gold thickness is very thick, the waveguide mode and the surface plasmon mode cannot be coupled together, so the quality factor will be relatively low. When the thickness of gold is reduced to 10nm, at this time, the two modes are strongly coupled together to form a Fano resonance line (an asymmetric line), which reduces the half-w...

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Abstract

The invention relates to a magneto-optic plasma biosensor, which belongs to the field of optical sensing, and particularly relates to the magneto-optic surface plasma resonance technology. The magneto-optic plasma biosensor comprises a silicon dioxide substrate and a gold film, wherein on the silicon dioxide substrate, and between the substrate and the gold film, a titanium nitride layer, a silicon dioxide layer, a yttrium iron garnet layer and a cerium-doped yttrium iron garnet layer are sequentially arranged in a direction from the substrate to the gold film. The magneto-optic plasma biosensor provided by the invention has the beneficial effects of novel structure, high quality factor, material stability, difficulty in oxidization, simple in structure, and low in cost.

Description

technical field [0001] The invention belongs to the field of optical sensing, in particular to magneto-optic surface plasmon resonance technology. Background technique [0002] Surface plasmon resonance is an effect of collective oscillation of electrons and plasmons on the surface of metals and dielectrics. Due to the large electric field enhancement and the localization of the field at the interface between the metal and the medium, it is widely used in label-free biosensing, chemical sensing, etc. However, due to the large loss of gold, the resolution of devices based on this effect is limited. The traditional surface plasmon sensor has a quality factor of only 54RIU at 650nm laser wavelength -1 (refractive index unit), which cannot be applied to single-molecule biological detection. [0003] Magneto-optic surface plasmon resonance uses a magnetic field to modulate the surface plasmon effect, so that the sensor can obtain higher sensing performance. Magneto-optical su...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/552
CPCG01N21/553
Inventor 秦俊夏瞻毕磊
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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