XYtheta three-degree-of-freedom large-stroke and high-frequency response precision positioning platform

Abstract

The invention discloses an XYtheta three-degree-of-freedom large-stroke and high-frequency response precision positioning platform, which comprises a rigid base, wherein the inner side of the rigid base is connected with fixed ends at the outer sides of four double-layer diamond displacement amplification mechanisms separately; first rigid output ends at the inner sides of the four double-layer diamond displacement amplification mechanisms are connected with a flexible branch chain mechanism; a second rigid output end of the flexible branch chain mechanism is connected with a mobile platform; the center of the mobile platform is in rigid connection with a driven object through a threaded hole; the mobile platform, the flexible branch chain mechanism and the double-layer diamond displacement amplification mechanisms are rotationally symmetrical about the threaded hole; the first rigid output ends at the inner sides of the diamond displacement amplification mechanisms are connected with the rigid base through a rectangular beam; first rigid input ends of two sides of the diamond displacement amplification mechanisms are connected with piezoelectric ceramic; and the whole mechanism is formed by integrated processing of a steel plate through an electro-discharge machining process, a hollow cavity in the mechanism is processed to be transparent and an internal member of the hollow cavity is in a suspended state. Large-stroke and high-bandwidth high-precision displacement output can be achieved and the structure is simple and compact.

Description

technical field [0001] The invention belongs to the technical field of precision positioning platforms, in particular to an XYθ three-degree-of-freedom large-stroke high-frequency precision positioning platform. Background technique [0002] In recent years, with the rapid development of microelectronics technology, optical microassembly, biomedical micromanipulation and scanning probe microscope, the engineering field has put forward higher and higher requirements for precision positioning technology, especially for large travel, high frequency The demand for a sound positioning platform project is extremely urgent. Due to the advantages of high resolution, high stiffness and high energy density, piezoelectric ceramics are widely used in the field of precision drive and control. However, the output displacement of piezoelectric ceramics is extremely small. Even for stacked piezoelectric ceramics, the output displacement is generally its own. About 0.1% of the size. Theref...

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Problems solved by technology

At present, the degrees of freedom of the known precision positioning platforms are mostly two degrees of freedom, and the displacement output of more than two degrees of freedom can also be realized through complex mechanism design, but the output displacement, out

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