Atmospheric pressure plasma generating apparatus having integrated rf matching and analysis sensor unit

Abstract

The present invention relates to a high-frequency atmospheric pressure plasma generating apparatus including a high-frequency matching unit and an analysis sensor in a high-frequency atmospheric pressure plasma head. More particularly, the integrated high-frequency atmospheric pressure plasma generating apparatus includes a housing in which an existing high-frequency atmospheric pressure plasma head is embedded; a high-frequency input terminal which is installed on an upper plate for shielding an upper portion of the high-frequency atmospheric pressure plasma head embedded in the housing; and a matching unit which is used for matching a high frequency inputted to the high-frequency input terminal and an impedance. The matched high-frequency output that is an output of the matching unit passes through the analysis sensor to detect electrical characteristics of a high frequency supplied to the high-frequency atmospheric pressure plasma head.

Description

technical field [0001] The invention relates to a high-frequency normal-pressure plasma generator having a high-frequency matching part and an analysis sensor in a high-frequency normal-pressure plasma head. [0002] In more detail, the high-frequency atmospheric pressure plasma generating device with a matching part and an analysis sensor for the head of the present invention includes: a housing with a built-in high-frequency normal-pressure plasma head; The upper plate of the upper part of the high-frequency atmospheric pressure plasma head of the housing; and a matching part for matching the high-frequency input to the high-frequency input end and impedance. [0003] The integrated high-frequency atmospheric pressure plasma generator having a matching unit and an analysis sensor according to the present invention is characterized in that the matched high-frequency output as the output of the matching unit is detected by the analysis sensor and supplied to the high-frequency...

AI Technical Summary

Problems solved by technology

[0012] However, in a large-sized high-frequency normal-pressure plasma head, since the impedance is significantly small, a high-frequency coaxial cable for connecting the output terminal of the impedance matching device and the input terminal of the high-frequency normal-pressure plasma head generates a huge noise. High temperature heat, causing damage to connectors and cables, resulting in damage to many high frequency electrical

[0013] Since the connection of the above-mentioned high-frequency coaxial cable is a problem, in order to directly connect the output of the above-mentioned impedance matcher to the input terminal of the high-frequency normal-pressure plasma head, the impedance matcher can only be set at the upper end of the high-frequency normal-pressure plasma head However, in this way, there will be structural problems in combining with a wide-width impedance matcher due to the high-frequency atmospheric pressure plasma head having a narrow width and a long length.

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