Closed channel reaction tank system with deflector
A technology of reaction tank and guide plate, applied in the field of reaction tank system, can solve the problems of waste of precursor process cost, difficulty in achieving uniform coating film, uneven transmission of precursor, etc., and achieves improvement of diffusion efficiency and rapid growth of film. Effects of rate, shortening pulse time, increasing reactivity
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[0063] The implementation of the present invention is described below through specific specific examples, and those who are familiar with this technology can easily understand other advantages and effects of the present invention from the content disclosed in this description, and can also be implemented through other different specific examples or apply. Thus, the following invention encompasses that any feature of any particular embodiment disclosed herein may be combined with any feature of any other embodiment disclosed herein.
[0064] It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for the understanding and reading of those familiar with this technology, and are not used to limit the implementation of the present invention Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relations...
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