A flexible array substrate, display panel and manufacturing method
A flexible array and array substrate technology, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of pixel units that cannot be imaged, easy to break, and display signals cannot be transmitted to pixel units, so as to reduce the probability of breakage. , reduce the probability of fracture, increase the effect of elastic modulus
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Embodiment 1
[0046] see Figure 1a , Embodiment 1 of the present invention provides a flexible array substrate, including: a base substrate 110, a gate electrode 120, a gate insulating layer 130 whose upper surface is at least partly wave-shaped, and a wave-shaped layer disposed sequentially on the gate insulating layer. The active layer 140 and the waveform source and drain 150;
[0047] Among them, see Figure 1b , the crests 131 and troughs 132 of the gate insulating layer are arranged alternately in sequence along the direction of the bending edge;
[0048] The peak 141 of the active layer corresponds to the peak 131 of the gate insulating layer, and the valley 142 of the active layer corresponds to the valley 132 of the gate insulating layer;
[0049] The peaks 151 of the source and drain correspond to the peaks 131 of the gate insulating layer, and the valleys 152 of the source and drain correspond to the valleys 132 of the gate insulating layer.
[0050] Specifically, the arrangem...
Embodiment 2
[0056] Embodiment 2 of the present invention provides a flexible display panel, including the flexible array substrate described in Embodiment 1.
Embodiment 3
[0058] see Figure 5 , Embodiment 3 of the present invention provides a method for manufacturing the flexible array substrate described in Embodiment 1, the method comprising:
[0059] S501, using a patterning process to form a gate electrode on the base substrate;
[0060] S502. Using a patterning process, form a gate insulating layer whose upper surface is at least partially corrugated on the gate electrode; wherein, the crests and troughs of the gate insulating layer are alternately arranged in sequence along the direction of the bending edge;
[0061] S503, sequentially forming a corrugated active layer and a corrugated source and drain on the gate insulating layer whose upper surface is at least partially corrugated, wherein the peak of the active layer is the same as the peak of the gate insulating layer Correspondingly, the troughs of the active layer correspond to the troughs of the gate insulating layer, the peaks of the source and drain correspond to the peaks of th...
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