Pressure Sensor

A pressure sensor, pressure technology, applied in the direction of measuring fluid pressure, instruments, measuring devices, etc., can solve the problems of reduced sensor accuracy, change in output characteristics, no records, etc., to achieve improved accuracy, improved temperature responsiveness, and reduced deformation. Effect

Active Publication Date: 2019-09-17
SAGINOMIYA SEISAKUSHO INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When this thermal stress occurs, the pressure detection element deforms, the output characteristics of the pressure detection element change, and there is a problem that the accuracy of the sensor output decreases.
[0011] In addition, in Patent Document 3, although a method for evaluating the strength of an adhesive interface between a pad and a sealing resin in a semiconductor package is described, it is not related to a pressure sensor in which a pressure detection element and a supporting member are fixed with an adhesive. The relevant descriptions do not describe changes in output characteristics due to deformation of the pressure detection element.

Method used

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Embodiment Construction

[0036] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0037] figure 1 It is a longitudinal sectional view showing a liquid-sealed pressure sensor 100 as an example of the pressure sensor of the present invention.

[0038] figure 1 Among them, the liquid-sealed pressure sensor 100 includes: a fluid introduction part 110 for supplying a fluid to be pressure detected to a pressure chamber 112A described later; a pressure detection part 120 for detecting the pressure of the fluid in the pressure chamber 112A; The signal sending part 130 of the pressure signal detected by the pressure detecting part 120 ; and the outer surface member 140 covering the fluid introducing part 110 , the pressure detecting part 120 and the signal sending part 130 .

[0039] The fluid introduction part 110 includes: a metal joint member 111 connected to a pipe that guides a fluid to be pressure detected; Shaped metal bottom plate 112.

[0040] Th...

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PUM

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Abstract

It is an object of the present invention to provide a pressure sensor capable of reducing the deformation of a pressure detecting element due to a temperature change, improving the accuracy of the pressure sensor, and a pressure sensor for fixing the pressure detecting element to the support member by the adhesive Improvement of temperature responsiveness.The pressure sensor (100) of the present invention is characterized by comprising: a pressure detecting element (126) for detecting a pressure of the fluid; a supporting member (325) for supporting the pressure detecting element (126); and an adhesive for bonding the fixed pressure detecting element (126) and the supporting member (325); a thermo-stress reduction structure (325Aa) is provided on the surface of the adhesive layer (325A) made of an adhesive as a plurality of concavities and convexities which cooperate with a part of the support member (325).

Description

technical field [0001] The present invention relates to a pressure sensor, in particular to a pressure sensor in which a pressure detection element is fixed to a supporting member by an adhesive. Background technique [0002] Conventionally, as a pressure sensor that detects the pressure of a fluid, for example, a liquid-sealed pressure sensor similar to those disclosed in Patent Document 1 and Patent Document 2 is known. [0003] As will be described later, the liquid-sealed pressure sensor includes: a fluid supply unit that supplies fluid for pressure detection to a pressure chamber; a pressure detection unit that detects the pressure of the fluid in the pressure chamber; A signal sending part of a pressure signal; and an outer surface member covering the fluid supply part, the pressure detecting part, and the signal sending part. [0004] The pressure detection unit mainly includes: a casing with a through hole; a diaphragm welded to the outer peripheral edge of the thro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L19/14
CPCG01L19/147
Inventor 泷本和哉
Owner SAGINOMIYA SEISAKUSHO INC
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