A horizontal straightness measuring device and method thereof

Abstract

The invention discloses a horizontal linearity measuring device which comprises a bearer, a guiderail, an air flotation upper slide unit, a fixing assembly, an optical flat, a first potential sensor, a second potential sensor, an adjusting device and a probe. The air flotation upper slide unit is slidably mounted on the guiderail. The guiderail is fixedly mounted on the bearer. The optical flat is fixedly mounted on the fixing assembly. The working surface of the optical flat is parallel with the side surface of the fixing assembly. The fixing assembly is arranged on the air flotation upper slide unit. The first potential sensor and the second potential sensor are arranged in a manner of right facing the head end and the tail end of the side surface of the fixing assembly. The adjusting abuts against the fixing assembly in sliding for adjusting the head end or the tail end of the side surface of the fixing assembly. The probe contacts with the working surface of the optical flat. The invention further provides a horizontal linearity measurement method which has beneficial effects of convenient measurement, high speed and high precision.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and relates to a measuring device and a method thereof, in particular to a horizontal straightness measuring device and a method thereof. Background technique [0002] With the development of ultra-precision technical equipment, many ultra-precision equipment need to use high-precision air-bearing guide rails to achieve high-straightness movement, just like the ultra-precision air-bearing guide rails used on lithography machines. The straightness of the air-floating guide rail greatly affects the precision of the equipment, because after the air-floating guide rail is processed, it is necessary to measure whether the straightness of the air-floating guide rail meets the processing requirements. [0003] The laser interferometer is the most commonly used equipment for measuring straightness, but the laser interferometer is easily disturbed by the external environment during the measu...

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Problems solved by technology

[0003] The laser interferometer is the most commonly used equipment for measuring straightness, but the laser interferometer is easily disturbed by the external environment during the measurement process, such as random movement of personnel, equipment noise and light, etc.

In addition, the laser interferometer needs to adjust the optical path first to measure the straightness. Especially for those who are new to the laser interferometer equipment, the optical path adjustment is difficult and time-consuming, which seriously affects the measurement results and work efficiency.

[0004] The autocollimator is based on the principle of optical self-collimation imaging, but the measurement result is an angle value, such as arc seconds. When obtaining the straightness, the angle value needs to be converted to the straightness. Such calculations have errors. The case of enlargement

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