Monolithic resonant accelerometer gyroscope structure
An accelerometer and gyroscope technology, applied in the field of microelectronics, can solve the problems of high symmetry requirements for structural processing, increase of total structure volume and complexity, complex capacitance readout circuit, etc., to reduce volume and cost, structure Compact, simple design effect
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[0019] The present invention will be further described below in conjunction with the accompanying drawings.
[0020] Such as figure 1 As shown, a kind of monolithic resonant accelerometer gyroscope structure of the present invention, comprises the resonant type accelerometer that three frame type full decoupling gyroscopes, two resonant beams constitute, the input end horizontal side of resonant type accelerometer passes through solution The coupling beam is fixed to the anchor point, and the vertical side is connected to the gyroscope through the connecting beam; the inertial sensitive mass unit of the resonant accelerometer is composed of the mass of the gyroscope.
[0021] Among them, the resonant accelerometer includes resonant beams 19a, 19b, fixed support anchor points 1a, 1b, resonant beam and anchor point connectors 2a, 2b, resonant beam driving comb teeth fixed electrodes 3a, 3b, 3c, 3d, resonant beam detection Comb tooth fixed electrodes 4a, 4b, 4c, 4d, resonant bea...
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