Torque sensor based on capacitor edge effect

Abstract

The present invention discloses a torque sensor based on a capacitor edge effect. The sensor comprises a sensor outer ring, a trapezoid beam, a sensor inner ring, a moving electrode of an induction capacitor, a static electrode of an induction capacitor and a substrate. The static electrode of the induction capacitor is connected with the substrate and perpendicular to the moving electrode of the induction capacitor, is located at the outermost end of the moving electrode of the induction capacitor, and the static electrode of the induction capacitor is disposed along the axial direction of the sensor to be perpendicular to the substrate to form a capacitor based on the capacitor edge effect. The substrate is connected with the outer ring of the sensor, and relative position can be regulated to change an initial distance between the moving electrode of the induction capacitor and the static electrode of the induction capacitor to realize adjustability of the measuring range and the sensitivity of the sensor. According to the torque sensor based on the capacitor edge effect provided by the invention, the static electrode of the induction capacitor is vertically distributed at the maximum deformation of the moving electrode of the induction capacitor, the design has high sensitivity, high linearity and adjustable measuring range and the sensitivity so as to rapidly and accurately realize torque detection.

Description

technical field [0001] The invention belongs to the technical field of sensors, and relates to a moment sensor, in particular to a moment sensor installed on a robot joint based on capacitive edge effect. Background technique [0002] At present, in torque measurement, torque detection sensors are widely used. According to the way of torque signal generation, they can be divided into optical type, photoelectric type, magnetoelectric type and strain type, etc. Among them, the relatively mature torque sensors on the market are mainly electromagnetic and Strain type. The essence of the output signal of the magnetoelectric torque sensor is two angular displacement signals with phase difference. The torque information is obtained after the signal is combined and processed. It is a non-contact sensor without wear, but it is large in size and is not suitable for series In the field of robotics, the torque transmitted by the robot joints is measured, and it is not easy to install; ...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the problems of low sensor sensitivity and linearity, and design a torque sensor based on capacitive edge effects, so as to improve the sensitivity and linearity of torque detection, and realize the adjustable ability of sensitivity and range

Images