Resistor and method for manufacturing resistor
A manufacturing method and technology of resistors, applied in the direction of resistors, thick film resistors, resistor parts, etc., can solve the problems of solder cracks, peeling off of substrates and heat sinks, etc., to prevent peeling, excellent heat resistance, The effect of suppressing bending stress
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[0153] Hereinafter, the results of confirmation experiments conducted to confirm the effects of the present invention will be described.
[0154] (Examples 1 to 5 of the present invention)
[0155] On one side of a ceramic substrate (15 mm x 11 mm x 0.635 mmt) made of AlN, a Ta-Si-based resistor element (10 mm x 10 mm x 0.5 μm) was formed by sputtering. Next, Cu films were formed on both ends of the resistance element by sputtering, and then Cu electrodes (2 mm×10 mm) with a thickness of 1.6 μm were formed by electroplating. Next, on the other side of the ceramic substrate, a heat sink (20mm×13mm×3mmt) made of Al alloy (A1050) is laminated through an Al-Si based brazing foil, and a welding pressure of 3kgf / cm is applied in the lamination direction. 2 , held at 645° C. for 30 minutes in a vacuum atmosphere, and joined the ceramic substrate and heat sink with Al—Si-based brazing filler metal. Then, by cold straightening, which is the straightening step shown in the first embod...
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Abstract
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