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Vacuum pump

A vacuum pump and structure technology, applied in the field of improving the reliability of rotor damage countermeasures, can solve the problems of reducing the impact force and torque of the encapsulation shell, insufficient, low reliability, etc., to reduce the impact force, improve the reliability and strengthen the reliability. degree of effect

Inactive Publication Date: 2017-09-12
EDWARDS JAPAN
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a risk that the impact force and torque received by the high-strength components due to the destruction of the rotor will be transmitted to the package via the flange, thereby generating a force that deforms the package or a force that rotates the entire vacuum pump. In terms of the risk of damage to various devices on which the vacuum pump is mounted, such as damage to the chamber due to the rotational movement of the vacuum pump as a whole, it must be said that the reliability as a countermeasure against damage to the rotor is low.
In short, in the vacuum pump (turbomolecular pump 100) of this document 1, measures to reduce the impact force and torque transmitted to the destruction of the package when the rotor is destroyed are insufficient.

Method used

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no. 1 approach

[0056] figure 1 is a cross-sectional view of a vacuum pump to which the present invention is applicable, figure 2 As the first embodiment of the present invention (corrosion-proof structure of high-strength parts), the figure 1 The vacuum pump to which the present invention is applied is an enlarged cross-sectional view of the stator (fixed member) near the screw groove exhaust portion. In addition, in these figures, in order to make the main part of the present invention easy to see, the hatching of the rotor section is omitted. This also applies to other drawings.

[0057] figure 1 The vacuum pump P1 includes: a housing 1; a rotor 6 disposed in the housing 1; a support unit SP that supports the rotor 6 so that it can rotate; a drive unit DR that drives the rotor 6 in rotation; Exhaust Mechanism for Exhausting Inhaled Gas, Wing Exhaust Pt for Inhaling and Exhausting Gas Through Rotary Wing 7 and Fixed Wing 8, and Screw Groove for Inhaling and Exhausting Gas Using Thread ...

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Abstract

The invention provides a vacuum pump for improving the reliability of strategy for reducing rotator damage. In order to form a thread groove gas exhaust path in the peripheral side of a rotator, a fixing part, which is arranged on the inner peripheral side of an encapsulation shell (1(1A,1B)), comprises a thread groove gas exhaust part stator (9); in the peripheral side of the thread groove gas exhaust part stator (9), a high strength part (10), which is made of a material harder than the material of thread groove gas exhaust part stator (9), is installed; and in order to inhibit the corrosion, which is caused by corrosive components in the gas, on the high strength part (10), an anti-corrosion structure (St1) is arranged on the periphery of the high strength part (10).

Description

technical field [0001] The present invention relates to a vacuum pump used as a gas exhaust means for process chambers of semiconductor manufacturing equipment, flat panel display manufacturing equipment, and solar panel manufacturing equipment, and other chambers, and is particularly suitable for improving the reliability of rotor damage countermeasures. Background technique [0002] As such a vacuum pump, for example, a vacuum pump (turbomolecular pump 100 ) disclosed in Patent Document 1 is known. [0003] The vacuum pump (turbomolecular pump 100) of this document 1 includes a rotor (rotor 4) arranged in a package (base 50 and casing 52), and a support unit (upper radial electromagnet 64, lower radial electromagnet 64, thrust electromagnet 66, etc.), a drive unit (motor 40) that rotationally drives the rotor, and an exhaust mechanism unit that exhausts the gas sucked by the rotation of the rotor. [0004] The exhaust mechanism part of the vacuum pump (turbomolecular pump...

Claims

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Application Information

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IPC IPC(8): F04D19/04
CPCF04D19/042
Inventor 大立好伸前岛靖高阿田勉
Owner EDWARDS JAPAN
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