A Method of In-Situ Measuring Circular Plane Shape Error
A technology of plane shape and circular ring, applied in the field of on-site measurement of flatness error, can solve the problems that the angle error of the sensor support cannot be separated, it is difficult to apply flatness error detection, and it cannot be applied, so as to achieve on-site measurement, The effect of reducing the impact and reducing the processing time
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[0020] A method for in-situ measurement of circular plane shape error, the steps are as follows:
[0021] Step A: Install at least five touch sensors 8 on the sensor fixture 10, wherein three touch sensors 8V 1 , V 2 and V 3 It is a measuring sensor, which can be installed in any row of jacks in any group, but must be installed in the same row; the fourth contact sensor 8V 4 mounted on V 2 In the socket with an angle of 90°, and located in the center socket; the fifth touch sensor 8V 5 mounted on V 2 In the socket with an included angle of 90°, and located in the center socket, it is connected to V 4 Symmetrical; where V 1 , V 2 The enclosed central angle is α 1 , V 2 , V 3 The enclosed central angle is α 2 , where: α 1 = α 2 = α, and N is the number of measuring points on the DUT;
[0022] Step B: Set the inclination angle of the axis between the workpiece to be tested and the surface of the sensor fixture 10 as θ, and the rotation angle during each measuremen...
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