A kind of mems miniature solid-state lithium-ion battery and preparation method thereof
A lithium-ion battery, solid-state technology, used in the manufacture of electrolyte batteries, battery electrodes, secondary batteries, etc., can solve the problems of poor mechanical properties, battery failure, and high battery manufacturing costs, reduce damage and damage, improve energy density, The effect of reducing the overall mass
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[0023] The present invention will be further described below in conjunction with the accompanying drawings.
[0024] Such as figure 1 As shown, a MEMS miniature solid-state lithium-ion battery includes a base 1, and the base 1 is an L-shaped cantilever beam structure, which is divided into a transverse free surface and a longitudinal support portion, such as figure 2 shown. An insulating layer 3 , a positive electrode current collector layer 4 , a positive electrode layer 5 , a solid electrolyte layer 6 , a silicon negative electrode layer 7 , and a negative electrode current collector layer 8 are sequentially arranged on the upper surface of the substrate 1 from bottom to top. Wherein, the silicon negative electrode layer 7 is facing the lateral free surface of the substrate 1 , and the silicon negative electrode layer is not provided at the position facing the vertical support portion of the cantilever beam. A sensitive resistor 2 is arranged at the junction of the latera...
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