Inductive sensor calibration method and device for capacitive sensor displacement compensation

Abstract

The invention discloses an inductive sensor calibration method and device for capacitive sensor displacement compensation, and belongs to the technical field of precision measurement. The calibration method and device take a dual-frequency laser interferometer as a motion reference, a linear motor as a macro motion drive element, a ball guide rail as a macro motion guide element and a linear grating as a macro motion feedback element for macro motion rough positioning; and adopt a voice coil motor as a micro motion drive element, an air-flotation guide rail as a micro motion guide element and the dual-frequency laser interferometer and a linear grating scale as micro motion feedback elements for micro motion fine positioning to compensate for a macro motion positioning error. Four capacitive sensors are used to compensate the pitch and yaw errors of a macro and micro positioning platform. According to the invention, the contradiction between the travel and the precision of the displacement sensor calibration device can be effectively solved, and the dynamic and static calibration of the large-travel and high-precision inductive displacement sensor is realized.

Description

Technical field [0001] The invention belongs to the technical field of precision measurement, and mainly relates to a method and device for calibrating an inductance sensor for capacitance sensor displacement compensation. Background technique [0002] At present, my country's large-scale high-speed rotating equipment does not have ultra-precision measurement methods, assembly accuracy cannot be guaranteed, assembly efficiency is low, engine vibration and noise, etc., these are major problems that restrict the development of my country's military industry and national economy. Large-scale high-speed rotating equipment mainly refers to various large-scale high-end gas turbine engines, including aero engines, gas turbines for ships and high-performance power station gas turbines. At present, the aviation engine industry has become the pillar industry of the military industry and national economy of the world's aviation power. Under the premise of pursuing high performance, aero en...

AI Technical Summary

Problems solved by technology

The problem with this device is that it is only limited to the calibration of the flat capacitive displacement sensor, and the calibration stroke is small

The problem with this device is that it does not take into account the stroke and accuracy indicators, the accuracy is low, and it is impossible to achieve high-precision displacement sensor calibration

The calibration stroke of this device is small, and it is impossible to calibrate the displacement sensor with large stroke and high precision.

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