A pulse diagnosis instrument based on multi-point pressure sensor
A technology of pressure sensor and pulse diagnosis instrument, which is applied in the direction of measurement and diagnosis of the property and force of sensors, piezoelectric devices, etc. It can solve the problems of low sensitivity and accurate pulse diagnosis, so as to improve sensitivity, stability and tolerance Effect
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Embodiment 1-1
[0038] Such as figure 2 with image 3 As shown, after growing the graphene nano-wall 102 on the substrate 101 of 500um, the thermosetting elastomer PDMS film 103 is coated on the graphene nano-wall 102, the thickness of the PDMS film is 200um, and this embodiment is cured at a temperature of 20°C PDMS, the shape of PDMS after curing is as follows Figure 7 As shown, after the PDMS film 103 is solidified and formed into a film, it is cooled to 20°C and the PDMS / graphene nano-wall composite force-sensitive film is peeled off from the graphene growth substrate; the PDMS / graphene nano-wall composite force-sensitive film is laid on a suspended On the hole base, the two ends of the graphene nano-wall patterned strip are respectively connected to the two metal pins on the suspended hole base; a bump mold is placed on the PDMS surface of the PDMS / graphene nano-wall composite force-sensitive film, and the PDMS The glue is poured into the bump mold and cured at 80°C. After the PDMS b...
Embodiment 1-2
[0040] After growing the graphene nano-wall 102 on the substrate 101 of 500um, the thermosetting elastomer PDMS film 103 is coated on the graphene nano-wall 102, and the thickness of the PDMS film is 200um. In this embodiment, the graphene nano-wall is grown on the substrate 101 After 102, a thermosetting elastomer 103PDMS film is coated on the graphene nanowall 102. In this embodiment, PDMS is cured at a temperature of 40°C. The shape of the cured PDMS is as follows Figure 8 As shown, after the PDMS film 103 is solidified and formed into a film, it is cooled to 20°C and the PDMS / graphene nano-wall composite force-sensitive film is peeled off from the graphene growth substrate; the PDMS / graphene nano-wall composite force-sensitive film is laid on a suspended On the hole base, the two ends of the graphene nano-wall patterned strip are respectively connected to the two metal pins on the suspended hole base; a bump mold is placed on the PDMS surface of the PDMS / graphene nano-wall...
Embodiment 1-3
[0042] After growing the graphene nano-wall 102 on the substrate 101 of 500um, the thermosetting elastomer PDMS film 103 is coated on the graphene nano-wall 102, and the thickness of the PDMS film is 200um. In this embodiment, the graphene nano-wall is grown on the substrate 101 After 102, a thermosetting elastomer 103PDMS film is coated on the graphene nanowall 102. In this embodiment, PDMS is cured at a temperature of 80° C., and the cured PDMS form is as follows Figure 9As shown, after the PDMS film 103 is solidified and formed into a film, it is cooled to 20°C and the PDMS / graphene nano-wall composite force-sensitive film is peeled off from the graphene growth substrate; the PDMS / graphene nano-wall composite force-sensitive film is laid on a suspended On the hole base, the two ends of the graphene nano-wall patterned strip are respectively connected to the two metal pins on the suspended hole base; a bump mold is placed on the PDMS surface of the PDMS / graphene nano-wall co...
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Abstract
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