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High frequency response pressure sensor based on direct current glow discharge plasma principle

A DC glow discharge and pressure sensor technology, which is applied in the measurement of fluid pressure, measurement of fluid pressure through electromagnetic components, instruments, etc., can solve the problems of inconsistent experimental results and no exact theoretical support, so as to avoid decoupling and avoid Frequency interference, easily controlled effects

Inactive Publication Date: 2017-11-24
INST OF ENGINEERING THERMOPHYSICS - CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, the research on the physical mechanism of glow power plasma and its interaction with air is quite controversial, there is no exact theoretical support, and the experimental results are mixed

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  • High frequency response pressure sensor based on direct current glow discharge plasma principle
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  • High frequency response pressure sensor based on direct current glow discharge plasma principle

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Embodiment Construction

[0043] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0044] Such as Figure 1 to Figure 4 as shown, figure 1 It is a structural cross-sectional view of a high-frequency response pressure sensor based on the principle of DC glow discharge plasma according to an embodiment of the present invention, figure 2 It is a schematic structural diagram of a plasma pressure sensor that does not include a shield according to an embodiment of the present invention, image 3 It is a schematic structural diagram of a shielding case according to an embodiment of the present invention, Figure 4 It is a side view of a high-response pressure sensor based on the principle of DC glow discharge plasma in an embodiment of the present invention. The embodiment of the present invention discloses...

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Abstract

The invention discloses a high frequency response pressure sensor based on a direct current glow discharge plasma principle. The high frequency response pressure sensor comprises an electrode, a support structure and a shielding case, wherein the electrode comprises a cathode and an anode and is used for generating a plasma between the cathode and the anode under a high-voltage direct-current power supply effect; the support structure is used for supporting and fixing the electrode so as to guarantee that a stable gap is arranged between the cathode and the anode; and the shielding case is used for shielding the plasma and an extraneous gas so that the plasma is not influenced by an extraneous gas flow speed and just feels extraneous air pressure changes. Compared to a traditional piezoresistive sensor, the high frequency response pressure sensor provided in the invention has advantages that the sensor is not influenced by mass inertia and possesses a potential to break through a MHz high frequency response.

Description

technical field [0001] The invention relates to the intersection of multiple disciplines such as high-pressure gas discharge and aerodynamic thermodynamics, and in particular relates to a high-frequency response pressure sensor based on the principle of DC glow discharge plasma. Background technique [0002] The existing dynamic measurement technology has experienced rapid development for more than half a century, and the emerging contact dynamic measurement technology is typically represented by semiconductor silicon piezoresistive sensor technology and hot film and hot wire technology. Semiconductor silicon piezoresistive pressure sensor is a very mature technology, based on its developed dynamic pneumatic probe technology, it is widely used in the measurement of turbomachinery. However, the design of pneumatic probes is limited by many factors. In particular, the way the sensor is installed in the probe has a great impact on the frequency response of the probe. It is oft...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00
CPCG01L9/00G01L27/002G01L23/08
Inventor 李帆杜娟王偲臣张宏武聂超群
Owner INST OF ENGINEERING THERMOPHYSICS - CHINESE ACAD OF SCI
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