Thin film forming apparatus

Abstract

Provided is a thin film forming apparatus which has high productivity at low cost. A rotary device 21 comprising a turn table is disposed in a film forming chamber 11. After the alignment of an object 5a, 5b on which a film is to be formed at an alignment position 16, the object 5a, 5b, which is aligned with respect to a mask 4a, 4b, is placed on a substrate holder 34a, 34b provided on the rotary device 21. The rotary device 21 is rotated so as to transfer the object 5a, 5b to a film formation position 15. Thereafter, a film forming source 22 emitting fine particles of a film forming material is moved so as to form a thin film on the object 5a, 5b located at the film formation position 15. At this time, another object 5a, 5b on which a film has not been formed yet can be disposed at the alignment position 16 and the position thereof can be adjusted. Thus, the thin film forming apparatus 10 requires only one film forming source 22 and one apparatus necessary for alignment.

Description

technical field [0001] The present invention relates to the technical field of thin film forming devices, and in particular, to a thin film forming device that efficiently forms thin films. Background technique [0002] When forming a thin film of a film-forming material on a large film-forming object such as a glass substrate, a technique is widely used in which the film-forming object is placed in a vacuum chamber and minute particles such as vapor of the film-forming material are released from the film-forming source. It is moved to a position facing the object to be filmed, and fine particles are attached to the surface of the object to be filmed. [0003] Image 6 Reference numeral 110 is a thin film forming apparatus of this technology, two film forming chambers 111a, 111b and a plurality of vacuum chambers 113 are disposed around the transfer chamber 112, and the respective chambers 111a, 111b, 113 are connected to the transfer chamber 112. [0004] Substrate holders...

AI Technical Summary

Problems solved by technology

[0016] However, in this thin film forming apparatus 210, although one film forming source 222 can be installed, it is necessary to arrange an imaging device 235 and an alignment moving device on each of the substrate holders 221a and 221b, and a further low-cost thin film forming apparatus is required.

Images