Flow sensor with wide measurement range and high precision and production method

Abstract

The invention relates to the technical field of flow sensors, in particular to a flow sensor with wide measurement range and high precision and a production method. The flow sensor comprises a packaging main pipeline, the packaging main pipeline comprises a packaging main pipeline inlet cavity, a packaging main pipeline shunting cavity and a packaging main pipeline outlet cavity connected in sequence, a thick branched pipeline and a thin branched pipeline are arranged in the packaging main pipeline shunting cavity, one end of the thick branched pipeline and one end of the thin branched pipeline are communicated with the packaging main pipeline inlet cavity respectively, the other end of the thick branched pipeline and the other end of the thin branched pipeline are communicated with the packaging main pipeline outlet cavity respectively, and thermal flow testing devices are arranged in the thick branched pipeline and the thin branched pipeline respectively. Through arrangement of the thick branched pipeline and the thin branched pipeline in the packaging main pipeline shunting cavity and the thermal flow testing devices in the thick branched pipeline and the thin branched pipeline respectively, increasing and decreasing of the flow velocity of fluid to be tested can be achieved, so that the measurement range of the sensor is expanded, the measurement precision of the sensor is improved, and the detection sensitivity is improved at the same time.

Description

technical field [0001] The invention relates to the technical field of flow sensors, in particular to a wide-range and high-precision flow sensor and a manufacturing method, in particular to a flow sensor that realizes wide-range and high-precision measurement through flow differences caused by different calibers of bifurcated pipes. Background technique [0002] Micromachines have great application prospects in the fluid field, and microfluidic sensors used to measure various properties of fluids are an important field of microfluidic machinery. At present, the measurement of the properties of fluids mainly focuses on several aspects of flow velocity, flow rate and flow direction. Traditional differential pressure sensors measure flow through differential pressure, which is accurate and has good resolution at high flow rates, and poor accuracy at low flow rates. After more than 30 years of development, thermal micro flow sensors have been widely used. Thermal flow sensors ...

AI Technical Summary

Problems solved by technology

The traditional differential pressure sensor measures the flow through the pressure difference, which is accurate and has good resolution when the flow is high, and the accuracy is poor when the flow is low.

After more than 30 years of development, thermal micro-flow sensors have been widely used. Thermal flow sensors have many advantages, such as CMOS process compatibility and high sensitivity for low-flow measurements, but the accuracy is not enough for high-range flow tests.

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