Light blocking object nozzle maintaining device and light blocking object coating device

A technology for maintaining devices and nozzles, which can be used in photo-engraving process coating equipment and other directions to solve problems such as poor spray uniformity and consistency

Inactive Publication Date: 2017-12-12
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can improve the problem of poor uniformity and consistency of photoresist spraying in the early stage

Method used

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  • Light blocking object nozzle maintaining device and light blocking object coating device
  • Light blocking object nozzle maintaining device and light blocking object coating device
  • Light blocking object nozzle maintaining device and light blocking object coating device

Examples

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Embodiment Construction

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0027] The terms "comprising" and "having" and any variations thereof appearing in the specification, claims and drawings of this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the listed steps or units, but optionally also includes unlisted steps or units, or optionally further includes For other steps or units inherent in these processes, ...

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Abstract

The embodiment of the invention discloses a light blocking object nozzle maintaining device. The light blocking object nozzle maintaining device comprises a roller and a scraping knife, wherein the roller can rotate and is used for maintaining a nozzle; the scraping knife is arranged by attaching to the outer surface of the roller; the scraping knife is in surface contact with the outer surface of the roller, and the roller rotates to drive the scraping knife to clear light blocking objects on the surface of the roller. The embodiment of the invention also discloses a light blocking object coating device. The light blocking object coating device has the advantages of improving the poor front-stage spraying uniformity and consistency of light blocking.

Description

technical field [0001] The invention relates to the field of photoresist coating, in particular to a photoresist nozzle maintenance device and a photoresist coating device. Background technique [0002] The yellow light process of the array substrate of the liquid crystal display device is to transfer the pattern of the mask to the substrate. In this process, photoresist needs to be coated. In order to make the photoresist coated on the substrate with better consistency and uniformity, the existing technology The nozzles for spraying photoresist must be maintained every time they work for a certain period of time. The specific maintenance includes three steps: see figure 1 and figure 2 , in the first step, the nozzle 130 sprays the photoresist on the cylinder 110, and at the same time, the scraper 120 scrapes off the photoresist on the outer surface of the cylinder 110, so that the nozzle 130 forms a flat end surface, and the nozzle 130 provides consistency in the subseque...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/16
CPCG03F7/16
Inventor 吴双
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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