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Zero-point fine tuning device for grating type micro-nano positioning platform

A technology of micro-nano positioning and fine-tuning devices, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of inconsistent zero points and no fixed zero point marks, and achieve positioning accuracy, improved operability, and high-precision assembly. Effect

Active Publication Date: 2017-12-22
SHANDONG UNIV
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Problems solved by technology

[0003] Aiming at the problem that the grating-type micro-nano positioning platform disclosed in the existing literature has no fixed zero mark and the zero point is inconsistent during repeated movements, the present invention provides a zero-point fine-tuning device for the grating-type micro-nano positioning platform. Zero trim

Method used

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  • Zero-point fine tuning device for grating type micro-nano positioning platform
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  • Zero-point fine tuning device for grating type micro-nano positioning platform

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[0025] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0026] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.

[0027] Terminology explanation part: "the side of the right-angled side structure of the base" described in the ...

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Abstract

The invention discloses a zero-point fine tuning device for a grating type micro-nano positioning platform. The zero-point fine tuning device comprises a platform body and a motion part. On the basis of cooperation between a pedestal and a return spring, the freedom degree of a grating read-in head in an actual application process is increased. With introduction of a differential head and a wedge block, fine tuning of the motion of the pedestal is realized by inclined-surface transmission; and the fine tuning displacement can be read directly by number reading by the differential head, so that the operability of the user is enhanced. Meanwhile, positioning bar structures are arranged at the sides of cooperation between the motion part and a grating ruler, so that the high positioning precision of the grating rule is realized. During actual assembling, high-precision assembling of the grating ruler is realized without any special clamping fixture, so that the requirement of the zero point position precision of the grating ruler is met.

Description

technical field [0001] The invention relates to a zero-point marking means in the process of micro-nano operation, in particular to a zero-point fine-tuning device for a grating-type micro-nano positioning platform, belonging to the field of micro-nano operation. Background technique [0002] With the development of nanotechnology, the research fields and horizons of natural sciences such as physics, chemistry, and biology have been effectively broadened, and even new disciplines have been born. Especially since the beginning of the 21st century, the rapid development of nanotechnology has greatly improved people's understanding of the microscopic world, and on this basis, it has produced technical means that can support human beings to explore the principles of matter at the microscopic scale, and provide information for microelectronics. New breakthroughs in the industry in the post-Moore era, improvements in scale, precision and speed of equipment manufacturing in the fie...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/02
CPCG01B11/00G01B11/02
Inventor 闫鹏鲁帅帅李建明
Owner SHANDONG UNIV
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