Detection method of surface shape error of large size correction disc in ring throwing

Abstract

The invention provides a high-precision detection method for a large-size correction disk surface shape error in ring polishing. The large-size correction disk surface shape error detection method inring polishing comprises the steps that 1) a displacement sensor is used to detect the surface shape of a correction disk through a circular arc path; 2) a straightness meter bridge is used to calibrate the height of a reference point relative to a center point; 3) and the radial profile of the correction disk is generated. According to the invention, aiming at the problem that the working face ofthe large-size correction disk faces downward and is difficultly turned over, and according to the characteristic that the surface shape of the correction disk is symmetrically distributed at the center, the surface shape of the correction disk is measured by circular arc path scanning in conjunction with the rotation of a machine polishing disk; the surface shape error of the large-size correction disk in a large ring polishing machine can be detected; the method has the advantages of simple and convenient detection process and high accuracy; the surface shape of the correction disk can be acquired through the method provided by the invention; the shape of an asphalt polishing disk can be inferred; and ring polishing processing process parameters are adjusted to improve the surface figure accuracy of an optical element.

Description

technical field [0001] The invention belongs to the field of optical processing, in particular to a method for detecting the surface shape error of a large-size correction disk in ring throwing. Background technique [0002] The ring polishing machine usually uses large-size, high-stability natural granite to make the base plate of the polishing disc, and the surface of the base plate is cast with a ring-shaped asphalt adhesive layer as the polishing disc. The ring surface of the asphalt polishing disc is sequentially placed with a correction disc and a workpiece disc, wherein the correction disc is used to correct and control the shape error of the polishing disc, while the workpiece disc is used to hold the component. During processing, the polishing disk, correction disk and workpiece disk all rotate counterclockwise at a certain speed at a constant speed, and the optical elements placed in the hole of the workpiece disk are removed under the action of the asphalt polishi...

AI Technical Summary

Problems solved by technology

CN106225647A discloses a straightness meter bridge with a probe in the middle to detect the straightness of each sub-section along the radial direction of the correction disc, and then obtains the detection method of the straightness in the entire radial direction through data processing. The accuracy of the dial indicator is low, and when the profile in the entire diameter direction is generated based on the segmented detection data, the errors of each segmented detection data will be accumulated and amplified, thereby affecting the overall measurement accuracy

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