An adjustable vibrator sensor mounting base
A sensor and adjustable technology, which is applied in semiconductor devices, electric solid devices, semiconductor/solid device manufacturing, etc., can solve the problems of equipment production capacity impact, long substrate residence time, equipment false alarms, etc., to achieve wide application and easy promotion and use Effect
Active Publication Date: 2019-04-16
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Problems solved by technology
[0007] However, in some cases, the vibrator sensor cannot normally send an electrical signal when the substrate enters or leaves the equipment, thus causing a false alarm of the equipment where it is located; or causing the substrate to stay in the equipment where it is located for too long long, so that the substrate may be over-processed and lead to scrap or rework, which not only causes waste in cost, but also has a certain impact on the production capacity of the equipment
Method used
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Embodiment Construction
[0032] The technical solution of an adjustable vibrator sensor mounting seat involved in the present invention will be further described in detail below with reference to the drawings and embodiments.
[0033] One embodiment of the present invention provides an adjustable vibrator sensor mounting base, which is used to be installed in the cavity of an OLED device, and a vibrator sensor is arranged on it, and is used to inform the OLED device whether there is a substrate to be processed therein.
[0034] see figure 1 As shown, the adjustable vibrator sensor mounting seat involved in the present invention includes a base 10 . An upper seat 20 is fitted on the base 10 , and a bracket 22 is arranged on the upper seat 20 . A support shaft 24 is rotatably connected to the bracket 22 , one end of the support shaft 24 is connected to the rotor 26 , and the other end is connected to the first trigger unit 32 of the vibrator sensor, specifically, a magnet. The second trigger unit 34 o...
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The invention provides an adjustable oscillator sensor installing base. The adjustable oscillator sensor installing base comprises a pedestal, an upper base is arranged on the pedestal in a matched manner, the upper base is provided with a support, the support is rotatably connected with a support shaft, one end of the support shaft is connected with a rotor, the other end of the support shaft isconnected with a first triggering unit of an oscillator sensor, and the upper base is also provided with a second triggering unit of the oscillator sensor. When the rotor makes contact with a substrate, the substrate pushes the rotor to enable the support shaft to rotate around the support, the first triggering unit connected with the other end of the support shaft is enabled to be close to or tomake contact with the second triggering unit, the approach or the contact of the two triggering units generates an electric signal, and the oscillator sensor receives the electric signal to send a signal of substrate entry to an OLED.
Description
technical field [0001] The invention relates to a vibrator sensor assembly used in OLED process equipment, in particular, an adjustable vibrator sensor mounting seat therein. Background technique [0002] It is known that in the field of display technology, flat panel display devices such as Liquid Crystal Display (LCD) and Organic Light Emitting Diode (OLED) have gradually replaced CRT displays. [0003] Among them, the LCD display device is composed of a thin film transistor array substrate (Thin Film Transistor Array Substrate, TFT Array Substrate) and a color filter (Color Filter, CF) substrate, and poured between the TFT substrate and the CF substrate. Liquid crystal, through electrification or not to control the liquid crystal molecules to change direction, and refract the light from the backlight module to produce a picture. [0004] OLED has many advantages such as self-illumination, low driving voltage, high luminous efficiency, short response time, high definition...
Claims
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IPC IPC(8): H01L51/56
Inventor 陈建锋
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD