A method for measuring surface defects of linear guide rail
A technology for linear guides and defects, which is applied in the field of measuring concave and convex defects on the surface of linear guides, can solve problems such as difficulty in repairing, difficulty in determining accurate positions, etc., and achieves the effects of simple and reasonable method, elimination of errors, and improvement of detection efficiency.
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[0015] Such as figure 1 As shown, a method for measuring surface defects of a linear guide rail includes a laser interferometer 1 , a beam splitter 2 , a camera 3 , a 45-degree right-angle prism 4 and a corner cube 5 . The measured X guide rail 8 is fixed on the right side of the upper end surface of the radiotherapy water tank. The measured X guide rail 8 is movably socketed on the X carrier 81 . The X stage 81 is fixed with the Y guide rail 7 to be tested. The upper end of the tested Y guide rail 7 is fixed to the X carrier 81, and the lower end extends into the bottom of the inner cavity of the radiotherapy water tank. The measured Y guide rail 7 is movably socketed on the Y carrier platform 71 . The Z guide rail to be tested is fixed on the Y stage 71 . The Z guide rail under test is socketed on the Z stage 61 . The Z stage 61 is connected to the scanning probe base (not shown in the figure). figure 1 In the figure, the left end of the figure is the original point of...
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