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Position detection device and position detection method

A detection device and detection method technology, which is applied in the direction of printing device, instrument, photoplate making process of pattern surface, etc., can solve the problem that the positioning of the substrate cannot be applied, and achieve the effect of reducing misalignment

Active Publication Date: 2019-10-22
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, for substrates with no alignment marks formed on the inner layer, the method of detecting the alignment marks from both sides and positioning the substrate cannot be applied.

Method used

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  • Position detection device and position detection method
  • Position detection device and position detection method
  • Position detection device and position detection method

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Experimental program
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Embodiment Construction

[0030] Below, reference Figure 1A ~ Figure 4 , The position detection device and the position detection method based on the embodiment will be described.

[0031] Figure 1A It is a schematic perspective view of the position detection device based on the embodiment. The position detection device based on this embodiment includes a support unit 10, an imaging device 11A, an imaging device 11B, a processing unit 12 and a storage unit 13. The processing target (ie, the substrate 50) is supported on the upper surface (support surface) of the support portion 10. The imaging device 11A captures images within the imaging range 15A on the support surface of the support portion 10 to acquire image data. The imaging device 11B images another area on the support surface of the support portion 10 to acquire image data. The processing unit 12 executes a processing program stored in the storage unit 13 to realize a position detection function. In addition to the processing program, the stor...

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Abstract

The present invention provides a position detection device capable of positioning a substrate on both front and back surfaces of the substrate. The supporting portion supports the substrate. At least one imaging device images the substrate supported by the support portion. The processing unit obtains positional information of the substrate based on a first image obtained by imaging a corner portion of the substrate supported by the support unit with one imaging device. After that, the processing unit obtains the position information of the substrate obtained from the first image based on the second image obtained by photographing the corner of the substrate whose front and back sides were reversed and supported on the support unit by a single imaging device, the first image, and the position information of the substrate obtained from the first image. The position information of the substrate after the front and back sides are reversed.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2016-146855 filed in Japan on July 27, 2016. The entire contents of this Japanese application are incorporated in this specification by reference. Technical field [0002] The invention relates to a position detection device and a position detection method. Background technique [0003] There is known a technique for positioning the substrate using alignment marks formed on the substrate when drawing or processing the substrate. When drawing or processing the front and back sides of the substrate, it is expected that the drawing positions or processing positions on the front and back sides are consistent with each other. Alignment marks can be implanted in the inner layer of the substrate, and an alignment mark can be detected from the front and back sides, thereby positioning on the front and back sides. [0004] As a method of detecting the alignment mark of the inner layer from both sides, a method...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J11/00
CPCB41J11/0095G03F7/70775G03F7/70641H01L21/67259G03F7/706845G03F7/706835
Inventor 冈本裕司
Owner SUMITOMO HEAVY IND LTD