Repair method of flat cathode short circuit of coating line

Abstract

The invention belongs to the technical field of glass production equipment and particularly relates to a maintenance method for a coating line planar cathode short circuit. The maintenance method comprises the following steps: during operation, firstly, determining that a planar cathode has short circuit fault, and further adopting an isolating transformer, a connecting line set and a control switch group; connecting the high voltage side of the isolating transformer into 220 V or 380 V single-phase power, connecting the secondary side of the isolating transformer with a cathode and an anode of the planar cathode and the control switch group to form a load output circuit, thereby performing maintenance and repair work of the planar cathode short circuit fault; disconnecting a direct current power supply, and closing the control switch group for N times; measuring the resistance of the planar cathode to ground when the control switch groups is disconnected each time; if a resistance value is zero, restarting the steps; and if the resistance value is not zero, showing that the planar cathode short circuit fault is removed. The technical problem that after the coating line planar cathode is short-circuited to cause target jumping, the coating line cathode cannot be restarted is effectively solved.

Description

technical field [0001] The invention belongs to the technical field of glass production equipment, and in particular relates to a method for repairing a flat cathode short circuit of a coating line. Background technique [0002] During the normal production process of the magnetron sputtering coating line, the space between the plane cathode and the anode base plate is narrow, and needle-shaped burrs are easy to grow under the action of the magnetic field. Once the plane cathode and the anode base plate are connected, the short circuit will cause target jumping. Short circuit protection and cannot be opened. In this case, the general practice in the prior art is to try to turn on the DC power supply several times, but if it cannot be turned on, it needs to be vented, which not only wastes time, but also increases the cost accordingly, and may also cause delays in production deadlines. Contents of the invention [0003] The purpose of the present invention is to provide a ...

Images