Multimode interference based silicon nitride light polarization beam splitter and preparation method thereof
A polarization beam splitter, multi-mode interference technology, applied in optics, instruments, optical components, etc., to achieve the effect of reducing return loss
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Embodiment 1
[0026] Such as figure 1 , 2 As shown, the silicon nitride optical polarization beam splitter based on multimode interference includes a waveguide beam splitter 1, an input waveguide 2, a phase shifter 3, a rectangular multimode interference waveguide 4, a first output waveguide 5 and a second output waveguide 6 , where the two output ends of the waveguide beam splitter 1 are respectively connected to one end of the input waveguide 2 and the input end of the phase shifter 3, and the output end of the phase shifter 3 and the other end of the input waveguide 2 are respectively connected to the rectangular multimode interference waveguide The two input ends of 4 are connected, and the two output ends of the rectangular multimode interference waveguide 4 are respectively connected with the first output waveguide 5 and the second output waveguide 6 .
[0027] In this embodiment, when the covering layer is air, the thickness of the waveguide beam splitter 1, the input waveguide 2, t...
Embodiment 2
[0034] Such as image 3 Shown is a schematic diagram of the preparation process of a silicon nitride optical polarization beam splitter based on multi-mode interference. Taking the thickness of the waveguide as 400 nm and the covering layer as air as an example, the specific process is as follows:
[0035] a) Deposit 400 nm thick silicon nitride 102 on the silicon dioxide substrate 101 .
[0036] b) Using electron beam lithography technology and reactive ion etching technology, prepare waveguide beam splitter 1, input waveguide 2, phase shifter 3, rectangular multimode interference waveguide 4, first output waveguide 5 and second output waveguide 6 , to obtain the optical polarization beam splitter 103.
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