Scanning coil, scanning electron microscope and encapsulation device of scanning coil

Abstract

The invention relate to a scanning coil, a scanning electron microscope and an encapsulation device of the scanning coil. The scanning coil comprises a framework, a circuit board and a coil and also comprises a package adhesive layer, wherein the circuit board is arranged on the framework, the coil is fixed on the framework, the package adhesive layer is used for integrally packaging the framework, the coil and the circuit board, and a wiring end of the circuit board extends out of the package adhesive layer. The package adhesive layer is used for integrally packaging the framework, the coil and the circuit board, and the scanning coil is of an integrated structure, is convenient to fix in a lens cylinder and has relatively high symmetry relative to a central axis. The encapsulation deviceis provided with a positioning structure which is used for coaxially positioning the scanning coil and enabling an axis of the framework of the scanning coil and an axis of an encapsulation cavity tobe coaxial, and the scanning coil after being encapsulated can be enabled to have relatively high rotation symmetry relative to the central axis.

Description

technical field [0001] The invention relates to the technical field of scanning coil potting, in particular to a scanning coil, a scanning electron microscope and a potting device for the scanning coil. Background technique [0002] The scanning electron microscope is an electron optical instrument that scans the surface of the sample line by line with a focused electron beam. The electron beam bombards the surface of the sample to generate secondary electrons or backscattered electrons. The secondary electrons or backscattered electrons generated on the surface are collected, and the scanning position of the electron beam on the surface of the sample and the number of secondary electrons or backscattered electrons generated are represented in the form of a two-dimensional image, that is, the secondary electrons of the scanning electron microscope are obtained. image or backscattered electron image. The resolution of scanning electron microscope images can reach the nanomet...

AI Technical Summary

Problems solved by technology

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect that the scanning coil assembly in the prior art has poor rotational symmetry relative to the central axis, thereby providing a scanning coil with high rotational symmetry relative to the central axis

[0006] Another technical problem to be solved by the present invention is to overcome the defect that the scanning electron microscope in the prior art has low imaging quality due to the low working stability of the scanning coil, thereby providing a scanning electron microscope with high imaging quality

Images