Method of operating a cryopump and cryopump system
A cryogenic pump and cryogenic technology, applied in the field of pump systems, can solve the problem of limited power supply options for cryopump systems
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[0110] refer to Figure 10 , showing different actuator / spool strategies that achieve the same drive piston motion. The examples illustrate that using a method of operating a cryopump according to the principles of the present invention can reduce the power draw per pumping event by half or more relative to a reference strategy.
[0111] Strategy 1 mirrors the reference strategy in which hydraulically piloted actuators are activated to move the spool valve to the reference fill position (approximately 3.5mm) and remain in position for the entire reference time period (approximately 30ms) middle. The actuation event is a combination of the start phase and the hold phase of the armature of the hydraulic pilot actuator, each with a different power requirement. The power calculation for strategy 1 is as follows:
[0112] Starting power=4.4V×3A=13.2V·A
[0113] Startup duration = 0.5ms
[0114] Holding power = V×A=V·A
[0115] Hold duration (pump stroke): 29.5ms
[0116] Pow...
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