Micro-fluidic flexible sensor

Abstract

The invention provides a micro-fluidic flexible sensor and relates to a sensor. The micro-fluidic flexible sensor comprises a flexible substrate, a micro-fluidic channel, micro-fluid and an oxygen sensor, and can be used for measuring the structure surface deformation and the normal pressure or can be used in a micro-fluidic system to measure the liquid flow rate. The micro-fluidic flexible sensoris used for measuring the structure surface deformation and the normal pressure and is integrated on the structure surface; the change in the shape of the micro-fluid is caused by the structure deformation; the micro-fluid in a main flow channel enters a branch flow channel, and air in the branch flow channel is compressed, so that the oxygen concentration is changed, and oxygen permeates througha flexible porous membrane into the oxygen sensor integrated at the bottom to measure the oxygen concentration inside the branch flow channel in real time; the micro-fluidic system is used for monitoring the liquid flow rate in the micro-fluidic channel, the fluid flows through the main flow channel, and a larger flow rate of the fluid leads to more fluid extruded into the branch flow channel; the air in the branch flow channel is compressed, so that the oxygen concentration is higher; the oxygen concentration in the branch flow channel is monitored through the oxygen sensor, and the size ofa variable is accurately measured in real time. The micro-fluidic flexible sensor is low in manufacturing cost, capable of monitoring many variables and high in sensitivity.

Description

technical field [0001] The present invention relates to sensors, in particular to microfluidic flexible sensors based on MEMS technology, which can be integrated on the surface of any complex structure for measuring the normal pressure on the structure and the in-plane deformation of the structure, and can also be used in microfluidic systems A microfluidic flexible sensor for measuring fluid flow velocity. Background technique [0002] As the main information source of the control system, sensors have penetrated into important fields such as industrial production, aerospace, marine exploration, environmental protection, medical diagnosis, bioengineering, space development and smart home. To some extent, sensors are key components that determine a system's characteristics and performance indicators. At present, sensors are mainly used in various fields to detect parameters such as in-plane deformation of structures, surface pressure, gas composition, temperature, and humidi...

AI Technical Summary

Problems solved by technology

Although the above two kinds of flexible sensors can measure the in-plane pressure and normal pressure of the structure, they all rely on the deformation of the sensor itself to calibrate the resistance change to calibrate the magnitude of the force. Not only the thickness of the sensor is large, but also the sensitivity is low.

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