Translation two-degree-of-freedom parallel flexible structure piezoelectric micro-motion platform

Abstract

The invention provides a translation two-degree-of-freedom parallel flexible structure piezoelectric micro-motion platform which comprises a fixed platform, a movable platform, a lateral movement mechanism and a longitudinal movement mechanism. The movement mechanism in each direction is formed by a displacement output unit, a displacement transmission unit and an auxiliary unit. The output end ofthe displacement output unit is connected to a rigid connection rod of the displacement transmission unit. The displacement transmission unit and the auxiliary unit are formed by respective rigid connection rod and two groups of flexible thin plates. The first group of flexible thin plates is connected to the rigid connection rod and the fixed platform, and the second group of flexible thin plates is connected to the rigid connection rod and the movable platform. The lateral displacement transmission unit and the first group of flexible thin plates of the auxiliary unit are arranged along a longitudinal direction, and the lateral displacement transmission unit and the second group of flexible thin plates of the auxiliary unit are arranged along a transverse direction. The translation two-degree-of-freedom parallel flexible structure piezoelectric micro-motion platform has the advantages of a compact structure, a large working surface, a large displacement range, no displacement coupling, no fall of a piezoelectric actuator during an assembly process and easy integration of a sensor to the platform.

Description

technical field [0001] The invention belongs to the technical field of micro / nano positioning, relates to a micro-displacement mechanism in a micro / nano positioning system, and in particular relates to a piezoelectric micro-movement platform with a parallel translational two-degree-of-freedom flexible structure. Background technique [0002] The flexible structure piezoelectric micro-movement platform is a micro-displacement mechanism that transmits displacement and force through a flexible structure that can generate elastic deformation. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear are generated; due to the use of piezoelectric actuators, its displacement resolution can reach nanometer level, response time can reach millisecond level, and stiffness Large, small in size and strong in carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as p...

AI Technical Summary

Problems solved by technology

[0005] The disadvantages of this kind of micro-motion platform are: 1. The piezoelectric actuator is placed along the movement direction of the moving platform, which occupies a large space, the platform structure is not compact, and the work surface is small.

2. There is no structure in the platform to amplify the output displacement of the piezoelectric actuator, and the output displacement of the working platform is small

3. There is no structure in the platform to avoid the torque of the pre-tightening screw when the piezoelectric actuator is pre-tightened, so the piezoelectric actuator will be subjected to the torque of the pre-tightening screw during the pre-tightening process, so that the piezoelectric actuator The actuator is fragile

4. There is no structure for positioning the two ends of the piezoelectric actuator in the platform, which makes the piezoelectric actuator easy to fall off during the assembly process

5. The sensor is fixed on the fixed frame through the sensor fixture, resulting in a huge platform structure, and the initial gap between the sensor probe and the measured surface is not easy to adjust

Images