Manufacturing method for flexible variable-angle array diffraction optical device made of photosensitive polyimide material

Abstract

The invention discloses a manufacturing method for a flexible variable-angle array diffraction optical device made of a photosensitive polyimide material, and the method comprises the following steps:1, preparing a flexible variable-angle array diffraction optical device mask template comprising N groups of one-dimensional two-element diffraction optical structures for use; 2, selecting a siliconwafer as the substrate material and carrying out the cleaning; 3, coating the silicon wafer with a photoresist layer, and carrying out the heat curing to enable the photoresist layer as a sacrificiallayer; 4, preparing photosensitive polyimide photoresist solution; 5, coating the sacrificial layer with the photosensitive polyimide photoresist, carrying out the prebaking of the photosensitive polyimide photoresist, employing the mask template for exposure, carrying out the development and postbaking curing, and forming a photosensitive polyimide photoresist diffraction pattern; 6, removing the sacrificial layer and the silicon wafer located below the sacrificial layer, and forming the flexible variable-angle array diffraction optical device. The method is good in full-band speckle inhibition effect, is simple in operation mode, is easy to implement, is good in system universality, is good in robustness, and is low in cost.

Description

technical field [0001] The invention belongs to the field of laser display projection, and in particular relates to a method for manufacturing a flexible variable-angle array diffractive optical device made of photosensitive polyimide material. Background technique [0002] Laser projection display system is getting more and more attention and welcome because of its rich colors, high picture quality, long life, high reliability, high efficiency, low energy consumption and other advantages. However, since laser light is highly coherent light, a picture noise called laser speckle will inevitably be generated. Speckle appears as black spots randomly distributed in the laser spot, and its essence is the random coherent superposition of signals. The existence of speckle seriously affects the quality of images and information. In the field of laser projection display, speckle will degrade the image quality of projection display, cause viewers to experience symptoms such as fatigu...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the disadvantages of the prior art that the speckle suppression effect is not good enough, full-band speckle suppression cannot be performed, the number and types of devices used in the system are large, the moving parts are complex and have impact damage to the instrument, the size is large, the structure of the instrument is complex, and the energy consumption is high. , the present invention provides a diffractive optical device with good full-band speckle suppression effect, simple movement mode, easy implementation, system versatility, good robustness, and low cost and a manufacturing method thereof, which is made of photosensitive polyimide material , Through the variable-angle array diffraction structure, the crawler transmission that can circulate infinitely at a constant speed can replace the reciprocating mechanical movement to achieve red, green, and blue full-band laser speckle suppression

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