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pressure drop recovery system

A technology for restoring systems and analyzing systems, applied in data processing applications, instruments, computing, etc., can solve problems such as processing and time-consuming that cannot be optimized, and achieve the effect of improving efficiency, reducing demand, and restoring equipment in an orderly and efficient manner.

Active Publication Date: 2022-03-04
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These are usually human assessments, mostly manual operations based on experience, which is time-consuming and cannot handle these issues more optimally

Method used

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Embodiment Construction

[0027] The pressure drop restoration system of the present invention will be described in more detail below in conjunction with schematic diagrams, wherein a preferred embodiment of the present invention is shown, and it should be understood that those skilled in the art can modify the present invention described herein while still achieving the beneficial effects of the present invention . Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.

[0028] In the following paragraphs the invention is described more specifically by way of example with reference to the accompanying drawings. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the em...

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Abstract

The invention discloses a pressure drop restoration system. The pressure drop recovery system includes: an equipment recovery scheduling module, which provides equipment recovery priority; a risk analysis module, which evaluates the risk level of the affected product, and provides a real-time risk level; a product processing module, based on the real-time risk level. The affected products are processed and interact with the risk analysis module in real time to update the real-time risk level; and the health monitoring module monitors whether the recovered equipment is normal. The voltage drop restoration system of the present invention can efficiently realize the restoration of factory production after a power failure.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a voltage drop recovery system. Background technique [0002] Fab Power Glitch issue is a phenomenon in which the power in the fab undergoes a voltage drop due to a problem in the transmission process of the external network circuit. When a power failure occurs, it will affect the equipment, cause equipment alarms, affect the wafer production process, and seriously cause equipment downtime (down) and wafer scrapping (scrap). After the power returns to normal, the Fab will restart the machine, test the relevant data (monitor), and evaluate the risk of the product for subsequent deployment. These are usually human assessments, mostly manual operations based on experience, which is time-consuming and cannot handle these issues more optimally. Contents of the invention [0003] The purpose of the present invention is to provide a voltage drop restoration system to efficien...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06Q10/06G06Q50/06
CPCG06Q10/0635G06Q50/06
Inventor 陈彧
Owner SEMICON MFG INT (SHANGHAI) CORP