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CCD-based linearity test method of swinging mirror

A test method and linearity technology, which are applied to measuring devices, instruments, optical devices, etc., can solve the problems of limited scale accuracy, inconvenient testing, limited accuracy, etc. Imaging effect optimized effect

Inactive Publication Date: 2018-04-13
北京长峰科威光电技术有限公司
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  • Application Information

AI Technical Summary

Problems solved by technology

The former method is simple, but the feedback signal reflects the position of the motor, which cannot directly reflect the linearity of the oscillating mirror, especially in the area where the oscillating mirror is far away from the motor axis, and the accuracy is limited
The method of measuring the laser projection reflected by optical scanning on the scale can directly and intuitively reflect the linearity of the pendulum mirror, but the accuracy of the scale is limited, and the entire system takes up a large space, requiring manual participation, which is inconvenient to test and cannot be compared with The whole system forms a closed loop

Method used

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  • CCD-based linearity test method of swinging mirror
  • CCD-based linearity test method of swinging mirror
  • CCD-based linearity test method of swinging mirror

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Embodiment Construction

[0012] Such as figure 1 As shown, the equipment used in the CCD-based pendulum mirror linearity test method mainly includes pendulum mirror 1, linear image sensor (CCD) 2, laser 3, and PC 4. The swing mirror 1 is connected to one end of the output shaft of the motor 5, and the other end of the output shaft of the motor 5 is connected to a high-precision photoelectric encoder 6. The pendulum mirror is driven to rotate by a motor, and a laser light source is used to illuminate the pendulum mirror, and a CCD is used to receive the reflected light of the pendulum mirror.

[0013] Such as figure 2 As shown, the CCD is used to receive the reflected light of the swing mirror to obtain a series of spot signals. The CCD converts the collected spot signals into analog electrical signals, and after AD conversion, they are output to the CCD drive circuit for calculations to calculate the coordinates of each spot Information; at the same time, the CCD reads the angle information of the swin...

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Abstract

The invention provides a CCD-based linearity test method of a swinging mirror. By use of a swinging mirror, a laser, a CCD and a PC, a swinging mirror linearity test system is formed. The swinging mirror is connected with one end of the output shaft of a motor. The other end of the output shaft of the motor is connected with a high-precision photoelectric coder. The motor drives the swinging mirror to rotate. The laser is used for emitting light sources to irradiate the swinging mirror. The CCD is used for receiving reflection light of the swinging mirror to obtain a series of light spot signals. The light spot signals are output to a CCD driving circuit through AD conversion so that coordinate information of each light spot is calculated. Meanwhile, the CCD reads the angle information ofthe rotation of the swinging mirror through the photoelectric coder, and calibrates the angle value corresponding to each light spot center. The angle values are output the PC, the actually measured angle value is compared with an entirely linear ideal angle value, so a difference value of the actually measured angle value and the ideal angle value is obtained and the linearity of the swinging mirror is calculated.

Description

Technical field [0001] The invention relates to the field of optoelectronic technology, in particular to a method for testing the linearity of a swing mirror based on a CCD, which is mainly applied to the test of the linearity of the swing mirror of a scanning imaging system and the optimization of the scanning imaging system. Background technique [0002] At present, the commonly used scanning imaging system swing mirror linearity test methods are mainly divided into two categories, one is indirect testing through the feedback signal in the motor, and the other is the measurement on the ruler by the laser projection of the optical scanning reflection. The former method is simple, but the feedback signal reflects the position of the motor, and cannot directly reflect the linearity of the swing mirror, especially in the area where the swing mirror is far from the motor axis, and the accuracy is limited. The method of measuring on the ruler by optical scanning and reflecting laser ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 周培涛
Owner 北京长峰科威光电技术有限公司
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