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Improved coaxial probe structure

A coaxial probe, an improved technology, applied in semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve problems such as prolonging the service life of coaxial probes

Active Publication Date: 2020-10-27
WIN SEMICON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of this, in order to solve the above-mentioned problems, the present invention provides an improved coaxial probe structure, which can effectively improve the deformation problem of the improved coaxial probe structure after long-term cycle use, thereby prolonging the life of the coaxial probe. Long service life, and its simple structure can be easily applied to existing coaxial probes

Method used

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Embodiment Construction

[0022] figure 1 Shown is an embodiment of an improved coaxial probe structure provided by the present invention, which includes: a base 10, a connector 20, a coaxial probe 30 and an elastic member 40, the base 10 has A first connecting portion 11, the connector 20 has a second connecting portion 21 for connecting to the first connecting portion 11 of the base body 10, the coaxial probe 30 is connected to a bottom of the connector 20 with a connecting end 31, And extend down from the bottom to a detection end 32, and there is at least an included angle θ between the connection end 31 and the detection end 32, one end of the elastic member 40 is connected to the base body 10, and the other end is connected to the connection of the coaxial probe 30 Between end 31 and detection end 32.

[0023] In the improved coaxial probe structure provided by the present invention, the second connecting portion 21 of the connector 20 and the first connecting portion 11 of the base 10 can be co...

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PUM

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Abstract

The invention provides an improved coaxial probe structure. The structure comprises a seat, a connector, a coaxial probe and an elastic piece; the seat includes a first connection portion; the connector includes a second connection portion connected to the first connection portion of the seat; the coaxial probe is connected to the bottom of the connector via a connection end and extends downwardlyto a detection end through the bottom; at least one included angle is formed between the connection end and the detection end; and the elastic piece is connected between the seat and the connection and detection ends of the coaxial probe.

Description

technical field [0001] The invention relates to an improved coaxial probe structure, in particular to an improved coaxial probe structure for testing high-frequency components. Background technique [0002] The manufacturing process of semiconductor devices can be divided into wafer manufacturing, wafer testing and packaging procedures. The wafer testing procedure includes touching the bonding pads on the wafer with probes, and then inputting the test signal of the testing machine into the wafer through the probes to test various properties of the wafer. The probe structure used for wafer testing should be flexible so that it can be pressed down to maintain contact with the pad during testing, and the cantilever probe structure is currently the most common elastic probe structure. [0003] With the development of the mobile device industry, the demand for high-frequency components has increased day by day in recent years. In order to reduce noise interference during high-fr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/66
CPCH01L22/14H01L22/30H01L22/34
Inventor 叶书政游筑乘
Owner WIN SEMICON