A sensor based on MEMS capacitive micro-accelerometers and an attitude and heading reference instrument

Abstract

The invention provides a sensor based on MEMS capacitive micro-accelerometers and an attitude and heading reference instrument. The sensor based on MEMS capacitive micro-accelerometers comprises a base, a plurality of MEMS capacitive micro-accelerometers arranged on the base, and a power module supplying power to the MEMS capacitive micro-accelerometers, wherein the axes of the MEMS capacitive micro-accelerometers form preset included angles. The sensor based on MEMS capacitive micro-accelerometers can be applied to automobile positioning, fine agricultural machinery vehicle navigation, fireproof unmanned aerial vehicles in forest regions, precision guided weapons, satellite detection and the like and has the advantages of good environmental adaptation and small variation with temperature;the sensor can acquire current acceleration information in real time accurately, improve the measurement precision, and continuously measure impact acceleration without obvious change in performancecharacteristics.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a sensor based on a MEMS capacitive micro-accelerometer and a heading attitude instrument. Background technique [0002] Currently, MEMS capacitive micro-accelerometers are the trend of testing and measuring acceleration today. MEMS capacitive micro-accelerometers have the advantages of low cost, small size, light weight, and low power consumption, so they have very important application values ​​in consumer electronics, vehicle positioning, structural mode measurement, guided weapons, and satellite detection. [0003] Traditional high-g impact sensors at home and abroad adopt the principle of piezoresistive or piezoelectric, and its accuracy can meet the requirements, and the processing difficulty is relatively low. However, the piezoresistive shock sensor has its own shortcomings, such as poor temperature characteristics, limited environmental adaptability, and great changes i...

AI Technical Summary

Problems solved by technology

However, the piezoresistive shock sensor has its own shortcomings, such as poor temperature characteristics, limited environmental adaptability, and great changes in the sensitivity index in the full temperature range, which directly affects the engineering test accuracy.

The piezoelectric shock sensor has a wide frequency response range and good dynamic characteristics, but when it continuously measures high shock acceleration, it will temporarily cause charge blocking, which will affect the output accuracy, and the piezoelectric crystal inside the piezoelectric shock sensor will affect the installation time base Extremely sensitive to mechanical stress transmitted from the seat to the crystal, which can affect the performance of the shock sensor

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