Device and method for rapid scanning detection of large-area optoelectronic devices
An optoelectronic device, fast scanning technology, applied in the direction of measuring devices, measuring electricity, measuring electrical variables, etc., can solve the problems of time-consuming rotation, low efficiency, shaking, etc., to avoid vibration, ensure accuracy, and low cost.
Active Publication Date: 2021-01-29
INST OF HIGH ENERGY PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
Each rotation of the turntable during the test is time-consuming and inefficient
And due to the quality of large-area photoelectric devices, there may be shaking during the test, which greatly affects the accuracy of the test results
Method used
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[0060] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted.
[0061] In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.
[0062...
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The invention discloses an apparatus and a method for quickly scanning and detecting the surface uniformity of a large-area photoelectric device. The device is mainly used for quickly scanning and testing the uniformity of a photoelectric device, and comprises a light source apparatus and a positioning frame. The light source apparatus comprises a driving power supply, a plurality of sub light sources and a plurality of light guide parts. The driving power supply is electrically connected with the sub light sources, and can light up the sub light sources in turn. The light guide parts are linear directional light guide parts, and the two ends of each light guide part are respectively a receiving end and an output end. The receiving end of each guide light part is optically connected with one light source. The light guide parts are arranged at intervals along the surface of the photoelectric device. The position information of the light guide parts represents the position information ofthe surface of a tested sample. The light output directions of the light guide parts are aligned with the surface normal of the photoelectric device. The apparatus and the method are especially suitable for fast scanning test of the uniformity of a large-area photoelectric device.
Description
technical field [0001] The present invention generally relates to the scanning test technology of optoelectronic devices, in particular to a device and method for fast scanning and testing large-area optoelectronic devices with low cost and stable performance. Background technique [0002] In the field of nuclear electronics and nuclear detectors, a large number of large-scale optoelectronic devices, such as large-area photomultiplier tubes (PMTs), will be used in the development of high-energy physics experiments and nuclear electronics and nuclear detectors. Although for a small photomultiplier tube, due to its limited effective area, the uniformity of its effective area is generally not considered in use. However, many tests have shown that no matter it is a planar photocathode or a spherical photocathode, since the transfer cathode system is not used to prepare the photocathode, the uniformity of the photocathode is limited by the arrangement position of the antimony bal...
Claims
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IPC IPC(8): G01R31/26
CPCG01R31/2601
Inventor 钱森高峰
Owner INST OF HIGH ENERGY PHYSICS CHINESE ACAD OF SCI