Device and method for detecting vapor deposition alignment effect

Abstract

The invention relates to the field of vapor deposition and discloses a device for detecting vapor deposition alignment effect. The device comprises a clean chamber for simulating a vacuum vapor deposition environment as well as an alignment device and an alignment effect detection device which are positioned in the clean chamber; the alignment effect detection device is arranged below a mask plate; the alignment effect detection device comprises a detection camera, a detection camera fixing piece, a detection camera fixing piece moving guide shaft and a detection camera fixing piece guide shaft moving guide rail; the guide rail is fixed in the clean chamber. By adoption of the technical scheme, the vapor deposition yield can be increased, waste is reduced and the production cost is reduced.

Description

technical field [0001] The invention relates to the field of vapor deposition, in particular to a device and method for detecting the alignment effect of vapor deposition. Background technique [0002] In recent years, Organic Light Emitting Diode (OLED) display has become a very popular emerging flat panel display product at home and abroad. OLED display has self-illumination, wide viewing angle, fast response, wide color gamut, low operating voltage, and thin panel , easy to make flexible panels, wide operating temperature range and other advantages. [0003] The vacuum evaporation method is usually used in the preparation of OLED devices. The evaporation material is heated and evaporated in a vacuum, so that the evaporated atoms or atomic groups are cooled and precipitated on a lower temperature substrate to form a thin film. The stability of the evaporation process has a great influence on the quality of the film. In order to achieve color display, in the evaporation p...

AI Technical Summary

Problems solved by technology

[0005] Since the metal mask is very thin, and the glass substrate is thick and heavy, the alignment process between the base substrate and the metal mask will cause the metal mask to be pressed down by the base substrate, causing the metal mask to Extrusion deformation; the opening pattern on the deformed metal mask plate and the anode pattern on the substrate substrate will not completely correspond, and there will be a certain degree of offset, so that the evaporation material cannot be accurately deposited in the place where the light needs to be emitted. On the anode pattern, there will be color shift, and in severe cases, there will be color mixing

[0006] The metal mask plate uses the alignment mechanism in the evaporation device to realize the correspondence between the opening pattern on the mask plate and the pattern of the substrate substrate. Once the alignment mechanism is abnormal, including the camera measurement error during alignment, It will cause the opening pattern on the metal mask plate and the pattern of the substrate substrate to not correspond one-to-one after the alignment is completed, resulting in color shift, and in severe cases, color mixing occurs

[0007] After the evaporation is completed, the glass can be judged whether there is any abnormality in the above process after the voltage is applied to emit light and detected. This situation has already wasted the substrate substrate and evaporation materials, resulting in an increase in production costs.

At the same time, the production yield also decreased

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