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Energy value calibration system and method for excimer laser energy detector

A technology of an excimer laser and a calibration method is applied in the field of energy value calibration system of an excimer laser energy detector, which can solve the problems of rough precision and narrowing of the detection energy range of photodiodes.

Active Publication Date: 2018-06-12
RAINBOW SOURCE LASER RSLASER
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Problems solved by technology

Most of the traditional calibration methods use the least squares fitting method, which requires the photodiode to work in a linear interval, so the detection energy range of the photodiode is reduced, and the calibration accuracy is relatively rough

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  • Energy value calibration system and method for excimer laser energy detector
  • Energy value calibration system and method for excimer laser energy detector
  • Energy value calibration system and method for excimer laser energy detector

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Embodiment Construction

[0028] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0029] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present invention and the above drawings are used to distinguish similar objects, and not necessarily Used to describe a specific sequence or sequence. It is to be understood that the terms so used are interchangeable under app...

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Abstract

The embodiment of the invention provides an energy value calibration system and method for an excimer laser energy detector. Learning is performed on a standard energy value by adopting a support vector regression (SVR) algorithm, and thus a relation between a voltage value and the standard energy value is obtained, so that calibration is performed on an energy value of a photoelectric energy detector. The support vector regression (SVR) is applied to calibration for an energy value of the excimer laser energy detector, thereby being capable of obtaining a more accurate energy value and a wider energy detection range.

Description

technical field [0001] The invention relates to the field of laser detection, in particular to an energy value calibration system and method for an excimer laser energy detector. Background technique [0002] 193nm ArF excimer laser is a pulsed gas laser for deep ultraviolet characteristic applications. It has the characteristics of high repetition frequency, high energy, short wavelength and narrow linewidth. It is an excellent laser light source for microelectronic lithography systems. [0003] In microelectronic lithography systems, the energy stability of excimer lasers is a very important indicator. The pulse energy stability of the excimer laser directly affects the critical dimension uniformity of integrated circuits in the photolithography process. In order to precisely control the single pulse energy of excimer laser, online measurement of laser pulse energy is very necessary. For the measurement of pulsed deep ultraviolet laser, there are two methods usually used...

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Application Information

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IPC IPC(8): G01J11/00
CPCG01J11/00
Inventor 冯泽斌韩晓泉刘广义刘斌张华刘志岩
Owner RAINBOW SOURCE LASER RSLASER
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