Laser energy acquisition method and laser energy acquisition device

Abstract

The invention provides a laser energy acquisition method and a laser energy acquisition device, and belongs to the photoetching technology field, and the laser energy acquisition method can be used for the laser imaging system. The laser energy acquisition method is characterized in that a light sampling module can be used to acquire light energy signals of a laser beam transmitted through a holophote, and can be used to send the acquired light energy signals to a signal processing module; the signal processing module can be used to eliminate the inherent base signals of the received light energy signal, and can be used to send the light energy signals without the inherent base signals to a main control module; the main control module can be used to acquire the actual energy of the laser beam transmitted by the laser device after processing the light energy signals without the inherent base signals. The laser energy acquisition method is advantageous in that the relatively accurate energy value of the laser beam actually output by the laser device can be effectively acquired without affecting the imaging and the energy utilization rate of the laser imaging system, and then the accuracy and the reliability of the energy control of the laser device can be effectively improved.

Description

technical field [0001] The present invention relates to the technical field of photolithography, in particular to a method and device for collecting laser energy. Background technique [0002] In the current semiconductor industry and printed circuit board industry, most of the laser dynamic imaging technology (Laser Dynamic Imaging, LDI) equipment is used in the exposure process. LDI equipment generally uses purple light or ultraviolet light to expose dry or wet films. The performance requirements of the film make the energy control very strict during the exposure process, so the energy of the laser needs to be monitored. In addition, the energy of lasers or laser diodes currently on the market will attenuate after being used for a certain period of time. When the energy attenuates to a critical value, it will affect exposure and development, making the produced circuit boards prone to short circuits or open circuits, resulting in Therefore, it is necessary to further moni...

AI Technical Summary

Problems solved by technology

In addition, the energy of lasers or laser diodes currently on the market will attenuate after being used for a certain period of time. When the energy attenuates to a critical value, it will affect exposure and development, making the produced circuit boards prone to short circuits or open circuits, resulting in A great economic loss, therefore, further monitoring of the energy is required in order to control the actual energy output by the laser or laser diode

However, due to the characteristics of the LDI device itself, when collecting the actual energy of the laser beam output by the laser or laser diode in the LDI device, if the energy harvesting probe is directly used to collect the energy of the main optical path used for exposure imaging in the LDI device to monitor the LDI device The actual energy of the output laser beam will affect the imaging and energy utilization of LDI equipment

Images