A flexible wearable resistive strain sensor and its preparation method

A resistive sensor and resistive strain technology, which is applied in the direction of sensors, electric/magnetic solid deformation measurement, applications, etc., can solve the problems of different sensitivity of sensors, reduced service life, and disorderly arrangement of micron-scale crack structure sizes, etc., to ensure Sensitivity and stability, the effect of simple operation

Active Publication Date: 2020-01-14
JILIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, although the above-mentioned strain sensor has a micro-nano-scale crack structure, the geometric parameters (length, depth, width) of the crack cannot be processed in a controlled manner, and the geometric parameters of the crack ultimately determine the sensitivity and stability of the sensor. lead to different sensitivity of different sensor individuals
In addition, the stability and service life of this type of sensor are greatly reduced due to the different sizes of the micron-scale crack structure and the disorderly arrangement during use.

Method used

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  • A flexible wearable resistive strain sensor and its preparation method
  • A flexible wearable resistive strain sensor and its preparation method
  • A flexible wearable resistive strain sensor and its preparation method

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Experimental program
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Embodiment Construction

[0041] Such as figure 1 and figure 2 As shown, a flexible wearable resistive strain sensor, which includes

[0042] barrier layer 1,

[0043] The sensing layer 2, the sensing layer 2 includes a micro-nano structure layer 5 and a sensitive layer 6, wherein the structural layer 5 is formed on the upper surface of the barrier layer 1, and the sensitive layer 6 is formed on the upper surface of the structural layer 5;

[0044] The electrode layer 3 includes two electrodes drawn from the surface of the sensitive layer 6;

[0045] The protective layer 4, the protective layer is located above the electrode layer.

[0046] First, the preparation of the structural layer 5, the template structure used in it, and the principle of crack formation are as follows: image 3 , Figure 4 Shown:

[0047] (1), SU-8 negative photoresist is evenly coated on the silicon substrate by spin coating, with a thickness of 15 μm, and soft baked in an oven at 90 ° C for 3 minutes;

[0048] (2), put...

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Abstract

The invention discloses a flexible wearable resistance type strain sensor and a preparation method thereof. The flexible wearable resistance type strain sensor comprises a flexible substrate, a sensing layer, an electrode layer and a protection layer. Compared with other similar sensors, the flexible wearable resistance type strain sensor has the characteristics that the fast large-area preparation can be realized; the stability is high; the sensitivity is high; the operation is simple and convenient, and the like. The flexible wearable resistance type strain sensor can be worn on the surfaceof the skin of the human body, and has the wide application prospects in aspects of human body motion detection, intelligent medical service and the like.

Description

technical field [0001] The invention relates to the field of physiological and mobile monitoring, in particular to a flexible wearable resistive strain sensor and a preparation method thereof. Background technique [0002] With the development of social economy and the improvement of people's living standards, people pay more and more attention to health problems. Traditional medical monitoring equipment has complex structure, high cost, long detection time, and may bring a lot of pain to patients and inconvenience to doctors' diagnosis, which can no longer meet people's requirements for medical care. Real-time and accurate detection of various health indicators of the human body, and data analysis of various indicators to make the best medical care plan in time is the trend of future development. [0003] Wearable strain sensors play a very important role in the real-time monitoring of human health indicators. For example, when exercising outdoors without a fitness trainer...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/16A61B5/11
CPCA61B5/11G01B7/18
Inventor 韩志武王可军刘林鹏张俊秋焦志彬宋洪烈陈道兵王大凯王倩牛士超任露泉
Owner JILIN UNIV
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