A flexible wearable resistive strain sensor and its preparation method
A resistive sensor and resistive strain technology, which is applied in the direction of sensors, electric/magnetic solid deformation measurement, applications, etc., can solve the problems of different sensitivity of sensors, reduced service life, and disorderly arrangement of micron-scale crack structure sizes, etc., to ensure Sensitivity and stability, the effect of simple operation
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[0041] Such as figure 1 and figure 2 As shown, a flexible wearable resistive strain sensor, which includes
[0042] barrier layer 1,
[0043] The sensing layer 2, the sensing layer 2 includes a micro-nano structure layer 5 and a sensitive layer 6, wherein the structural layer 5 is formed on the upper surface of the barrier layer 1, and the sensitive layer 6 is formed on the upper surface of the structural layer 5;
[0044] The electrode layer 3 includes two electrodes drawn from the surface of the sensitive layer 6;
[0045] The protective layer 4, the protective layer is located above the electrode layer.
[0046] First, the preparation of the structural layer 5, the template structure used in it, and the principle of crack formation are as follows: image 3 , Figure 4 Shown:
[0047] (1), SU-8 negative photoresist is evenly coated on the silicon substrate by spin coating, with a thickness of 15 μm, and soft baked in an oven at 90 ° C for 3 minutes;
[0048] (2), put...
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