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Arc heating belt and heating belt coating method

An arc-shaped, heating band technology, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of inability to have a uniform heating effect, poor versatility, uneven heating, etc.

Inactive Publication Date: 2018-07-27
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Existing heating zones such as figure 1 The conventional winding heating belt shown can not have a uniform heating effect because of the different winding methods
In addition, when winding in this way, the winding heating belt 11 cannot be in close contact with the pipeline 12, and a gap will be generated when the pipeline 12 is wrapped, thereby creating a gap between the hot spot 13 (Hot Spot) and the cold spot 14 (Cold Spot). Uneven heating phenomenon, and at the same time, it is impossible to properly cover the bend of the pipeline
And as in figure 2 The conventional heating jacket 21 (Heater Jacket) shown will need to be customized according to the size of the pipeline 22, so that its versatility is poor, and the bending angle cannot be adjusted along with the pipeline.

Method used

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  • Arc heating belt and heating belt coating method
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  • Arc heating belt and heating belt coating method

Examples

Experimental program
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Effect test

no. 1 example

[0049] Please refer to image 3 . image 3 Shown is a perspective view of the arc-shaped heating belt 31 of the first embodiment of the present invention. The arc-shaped heating belt 31 is composed of an arc-shaped belt body 311 and a fixing device 312 . As shown in the figure, the arc-shaped belt 311 is a long sheet with a semicircular cross-section, the radius of the inner arc is roughly equal to the outer diameter of the pipeline 32, and the arc-shaped belt 311 wraps around the pipeline 32 The circular angle is 180°. The fixing device 312 is a C-shaped fixing device made of metal, and its inner arc length is slightly smaller than the outer arc length of the arc-shaped belt 311 , thereby engaging the arc-shaped belt 311 . When in use, the arc-shaped belt body 311 is wrapped on the pipeline 32 in such a way that the longitudinal direction A of the arc-shaped belt body 311 is along the axial direction B of the pipeline pipeline 32, and then the fixing device 312 is used to ...

no. 2 example

[0055] Please refer to Figure 8 . Figure 8 Shown is a perspective view of the arc-shaped heating belt 71 of the second embodiment of the present invention. Same as the first embodiment, the arc-shaped heating belt 71 is composed of an arc-shaped belt body 711 and a fixing device 712 . As shown in the figure, the arc-shaped belt 711 is a long sheet with an arc-shaped cross section, the radius of the inner arc is roughly equal to the outer diameter of the pipeline 72, and the arc-shaped belt 711 wraps around the pipeline 72 The circular angle is 120°. The fixing device 712 is a C-shaped fixing device made of metal, and its inner arc length is slightly smaller than the outer arc length of the arc-shaped belt 711 , thereby engaging the arc-shaped belt 711 . When in use, the arc-shaped belt 711 is covered on the pipeline 72 in such a way that the longitudinal direction A of the arc-shaped belt 711 is along the axial direction B of the pipeline 72, and then the fixing device 71...

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Abstract

An arc heating belt is used for coating a pipeline and maintaining a temperature of the pipeline and comprises an arc belt body, a heating wire and a fixing device, wherein the heating wire is arranged in the arc belt body, and the fixing device is used for fixing the arc belt body on the pipeline. By the characteristic, the arc heating belt can be in closely contact with the pipeline when the pipeline is coated, uniform temperature distribution is achieved, meanwhile, the arc heating belt also can be suitable for pipeline bending, and the universality is improved.

Description

technical field [0001] The invention relates to an arc-shaped heating belt, in particular to an arc-shaped heating belt applied to a pipeline of semiconductor equipment and a coating method for the heating belt. Background technique [0002] During the semiconductor coating process, various gases enter the chamber through the pipeline. To avoid gas condensation, the gas line needs to be heated to maintain temperature. [0003] Existing heating zones such as figure 1 As shown, the conventional winding heating belt cannot have a uniform heating effect because of the different winding methods. In addition, when winding in this way, the winding heating belt 11 cannot be in close contact with the pipeline 12, and a gap will be generated when the pipeline 12 is wrapped, thereby creating a gap between the hot spot 13 (Hot Spot) and the cold spot 14 (Cold Spot). Uneven heating phenomenon, and at the same time, it is impossible to properly cover the bend of the pipeline. And as i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/263
CPCH01L21/2636
Inventor 周仁张宝戈孙泽江吕欣
Owner PIOTECH CO LTD