A silicon wafer edge protection device
A silicon wafer edge protection and silicon wafer technology, which is applied in photoplate-making process exposure devices, microlithography exposure equipment, instruments, etc., can solve the problems of long process connection time and low efficiency, so as to improve the protection efficiency and shorten the connection time. , the effect of high positioning accuracy
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Embodiment 1
[0043] Such as figure 1 with 8 As shown, the silicon wafer edge protection device of the present invention includes a protection ring 3, a fixing mechanism 4, and a lifting mechanism 5, wherein the protection ring 3 is installed on the fixing mechanism 4, and the lifting mechanism 5 is fixedly installed on the exposure table 1, and lifts The mechanism 5 drives the fixing mechanism 4 to perform lifting movement, that is, drives the protection ring 3 to perform the lifting movement; the protection ring 3 is a ring structure with a hollow center and solid edges, and the specifications of the protection ring 3 match the specifications of the silicon wafer 2 The positioning detection mechanism is used to detect whether the protection ring 3 moves to a set position, and ensure repeat positioning accuracy between the silicon wafer 2 and the protection ring 3 .
[0044] It should be noted that, according to different specifications of silicon wafers 2, the corresponding structure of ...
Embodiment 2
[0056] Such as Figure 12 As shown, the difference between this embodiment and Embodiment 1 is that the lifting mechanism of this embodiment adopts a lateral movement mechanism, and the lateral movement mechanism includes a hinge rod mechanism 54, a guide mechanism 55 and a second cylinder drive mechanism 56, and the hinge One end of the rod mechanism 54 , the guiding mechanism 55 and the second cylinder driving mechanism 56 are all installed on the bottom of the mounting seat 41 , and the other end is installed on the exposure table 1 .
[0057] Further, as Figure 14 As shown, the hinge rod mechanism 54 includes a plurality of hinge rods. In this embodiment, four hinge rods are preferably distributed symmetrically at the bottom of the mounting seat 41 to form a parallelogram. Each hinge rod includes a connecting rod and two hinges. Two ends of the connecting rod are respectively connected to the mounting seat 41 and the exposure table 1 through the two hinges.
[0058] Fur...
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