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Detecting apparatus

A testing equipment and technology to be tested, applied in semiconductor/solid-state device testing/measurement, electrical components, semiconductor/solid-state device manufacturing, etc., can solve problems such as abnormal quality of wafer 9, intermittent measurement, inability to measure from beginning to end, etc. , to achieve the effect of avoiding abnormal quality and stopping the test

Active Publication Date: 2018-08-17
SILICONWARE PRECISION IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the existing testing equipment 1, the sensing cycle of the temperature sensor 100 confirms the temperature of the chuck 10 every 8 seconds. Therefore, for the detection of high-power chips, if the testing equipment 1 only uses the ambient air temperature to cool down , there will always be intermittent measurement (that is, the measurement stops), and it is impossible to measure from the beginning to the end, thus easily causing the quality of the wafer 9 to be abnormal

Method used

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Embodiment Construction

[0045] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

[0046] It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification for the understanding and reading of those skilled in the art, and are not intended to limit the implementation of the present invention. Limiting conditions, so there is no technical substantive meaning, any modification of structure, change of proportional relationship or adjustment of size, without affecting the effect and purpose of the present invention, should still fall within the scope of the present invention. The disclosed technical content must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "righ...

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Abstract

A detecting apparatus is provided. The apparatus provides a better cooling effect by supplying gas to a carrying device for carrying an electronic component to be tested through a gas supply device toperform cooling, instead of cooling the existing ambient temperature.

Description

technical field [0001] The present invention relates to an electronic device, in particular to a detection device for detection operation. Background technique [0002] Generally speaking, a semiconductor device is manufactured on a semiconductor substrate (such as a wafer), so that multiple chips are produced on the wafer in the process, and then, through a grain sorting process, the entire wafer with multiple chips The electrical testing operation is performed on the wafer, and then the wafer is cut to separate each chip, and the chip is assembled with a lead frame, thereby obtaining a semiconductor device (such as a memory device). [0003] In the aforementioned electrical testing operations, a testing device with a tester is usually used to perform functional and operational testing operations on the chips of the wafer. Under the action of the tester, power and various test signals are input to the contact pads of the wafer through the contact terminals of a probe devic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66H01L21/67
CPCH01L21/67109H01L22/14
Inventor 陈承韶蔡明儒林伟胜
Owner SILICONWARE PRECISION IND CO LTD
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