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Photoresist spraying system

A photoresist and photoresist bottle technology, applied in the direction of spray device, liquid spray device, etc., can solve the problems of increasing human resource consumption, affecting film thickness, environmental pollution, etc., to reduce experimental uncertainties and reduce spray volume. Errors, the effect of saving human resources

Pending Publication Date: 2018-09-28
福建省福联集成电路有限公司
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AI Technical Summary

Problems solved by technology

[0009] The problem with the above technology is that there will be air bubbles when spraying the photoresist manually, which will affect the condition of the film surface. When spraying manually, there will be errors in the required spray volume, which will affect the film thickness.
Contamination of the environment in the cavity when spraying manually
It will cause waste of photoresist and consumables, slow down production efficiency and increase human resource consumption

Method used

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Embodiment Construction

[0029] In order to describe in detail the technical content, structural features, achieved objectives and effects of the technical solution, the following detailed descriptions are given in conjunction with specific embodiments and accompanying drawings.

[0030] See figure 1 In this embodiment, a system for spraying photoresist is introduced, including a control module 100, a suction device 102, a pump device 104, a storage device 106, and a pressure regulating device 108;

[0031] Please refer below figure 2 The control module is connected with the suction device, the pump device, the storage device, and the pressure regulating device, the suction device is connected with the spray nozzle, the pump device is connected with the suction device, and the pump device is also connected with the storage device. The storage device is used to connect the discharge end of the photoresist bottle, and the pressure regulating device is used to connect the pressurization end of the photoresis...

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PUM

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Abstract

The invention relates to a photoresist spraying system. The photoresist spraying system comprises a control module, a suck-back device, a pump device, a storage device and a pressure regulating device. The control module is connected with the suck-back device, the pump device and the storage device. The suck-back device is connected with a spraying nozzle. The pump device is connected with the suck-back device. The pump device is further connected with the storage device. The storage device is used for being connected with the discharging end of a photoresist bottle. The pressure regulating device is used for being connected with the pressurization end of the photoresist bottle and used for pumping gas into the photoresist bottle. By the adoption of the photoresist spraying system, the photoresist used in a processing and research and development test is saved, the test efficiency is improved, the human resources are saved, and the safety performance is improved.

Description

Technical field [0001] The invention relates to the field of miniaturized photoresist spraying, in particular to an improved photoresist spraying machine system. Background technique [0002] Because the miniature photoresist AZ-R200 used in the process and R&D experiments is a hydrophilic photoresist, if it is used in the original Coater machine, the chemicals in the Coater machine will affect the chemical properties of the miniature photoresist. When using the station, the photoresist cannot be sprayed by the existing device, and can only be sprayed manually. When manually spraying the miniature photoresist, air bubbles are generated and the spray volume cannot be accurately grasped, resulting in the deviation of the film surface condition and film thickness from the required specifications, thereby adding more uncertain factors to the process and R&D experiments, which affects the experiment schedule. At the same time, it will waste more consumables, reduce production effici...

Claims

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Application Information

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IPC IPC(8): B05B9/04B05B12/02B05B12/08B05B15/40B05B15/58
CPCB05B9/0403B05B12/02B05B12/081B05B15/40B05B15/58
Inventor 李伟许哲维颜书杰林金锡
Owner 福建省福联集成电路有限公司
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