Mask cleaning method and device

A mask, to-be-cleaned technology, applied in the field of electrochemistry, can solve problems such as in-depth research

Active Publication Date: 2018-10-02
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, the research on the method o

Method used

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  • Mask cleaning method and device
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  • Mask cleaning method and device

Examples

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Embodiment Construction

[0024] Embodiments of the present invention are described in detail below. The embodiments described below are exemplary only for explaining the present invention and should not be construed as limiting the present invention. If no specific technique or condition is indicated in the examples, it shall be carried out according to the technique or condition described in the literature in this field or according to the product specification. The reagents or instruments used were not indicated by the manufacturer, and they were all commercially available conventional products.

[0025] The present invention is based on the following knowledge and findings of the inventors:

[0026] At present, when cleaning the mask, due to the limitation of the process, there are often problems of over-cleaning (that is, the mask body is corroded by the cleaning solution) or under-cleaning (that is, the metal to be cleaned on the surface of the mask body is not completely cleaned) , for example...

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Abstract

The invention provides a mask cleaning method and device, wherein the mask cleaning method comprises: providing a mask to be washed, wherein the mask to be washed includes a mask body and a metal to be washed, and the metal to be washed is formed on at least part of the surface of the mask body; cleaning the mask to be washed while the mask body is under cathode protection. It is discovered by theinventor herein that the method is simple and convenient to perform and is easy to implement; a selection range of detergents is wide, cleaning cost is low, cleaning efficiency is high, at least partof the metal to be washed is recyclable, and economic and time costs are saved.

Description

technical field [0001] The present invention relates to the field of electrochemical technology, in particular to a method and device for cleaning a mask. Background technique [0002] Due to the advantages of self-illumination, bright colors, low power consumption, and wide viewing angle, OLED display devices are being used more and more widely. At present, evaporation technology is commonly used in the manufacture of OLED display devices, wherein a metal mask (Metal Mask, referred to as Mask) plays an extremely important role in the entire OLED display device production process. During the evaporation process, the evaporation material will be deposited on the Mask, and as the number and time of evaporation increase, the evaporation material deposited on the Mask will become thicker and thicker, which will affect the dimensional accuracy of the metal mask, resulting in Various vapor deposition failures. Therefore, when the Mask is used for a period of time, it needs to be...

Claims

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Application Information

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IPC IPC(8): C23C14/04B08B3/08C23G3/00C23F13/20
CPCB08B3/08C23C14/042C23F13/20C23G3/00
Inventor 徐倩丁渭渭嵇凤丽
Owner BOE TECH GRP CO LTD
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