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Network composite structure film and toughening synthesis method

A composite structure and thin film technology, which is applied in the field of oxide composite structure thin film and growth synthesis, can solve the problems of slow application and achieve the effects of improving poor flexibility, excellent mechanical properties and good industrial prospects

Active Publication Date: 2020-06-02
山东济清科技服务有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Based on graphene, carbon nanotubes, nanofibers and other emerging transparent conductive film materials, there are many problems such as film surface resistance, device compatibility, and process structure stability, which make their application in optoelectronic devices and large-area displays slow.

Method used

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  • Network composite structure film and toughening synthesis method
  • Network composite structure film and toughening synthesis method
  • Network composite structure film and toughening synthesis method

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Embodiment Construction

[0036]Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. The implementations described in the following exemplary examples do not represent all implementations consistent with the present invention. Rather, they are merely examples of devices and structures consistent with aspects of the invention as recited in the appended claims.

[0037] Aiming at the problem of poor flexibility of traditional oxide thin films, the embodiment of the present invention gives the idea of ​​improving the mechanical properties of thin films through structure, and the network ITO / SnO 2 / Sn composite structure film and its in-situ toughening synthesis method.

[0038] image 3 The network structure ITO / SnO provided for the embodiment of the present invention 2 Schematic flow chart of the thin film with / Sn composite structure. The method specifically includes the following steps:

[0039] Step S110: On the base ma...

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Abstract

The embodiment of the invention discloses a thin film of a net-shaped composite structure and a toughening synthesis method thereof. The thin film of the net-shaped composite structure is formed through the following step that a metal nanosheet is sputtered on a matrix, the metal surface layer is oxidized, and a nano crystal is grown by taking composite particles as a base point, and the compositethin film of the net-shaped structure is formed. The metal particles in the thin film of the net-shaped composite structure are tough-phased, and therefore the plastic deformation capability of the thin film can be improved, and the problem that the stress of the thin film is concentrated can be solved by nanowhiskers.

Description

technical field [0001] The invention relates to the technical field of oxide composite structure film and growth synthesis, in particular to a network composite structure film and a toughening synthesis method. Background technique [0002] Oxide thin films have the characteristics of good photoelectric properties, strong mechanical properties, high density and environmental stability, and are widely used in the field of optoelectronic devices. The development of modern information technology puts forward higher requirements for the flexible display of devices, and the inherent mechanical brittleness of oxide materials restricts its application and development in flexible electronic devices. [0003] Based on graphene, carbon nanotubes, nanofibers and other emerging transparent conductive film materials, there are many problems such as film surface resistance, device compatibility, and process structure stability, which make their application in optoelectronic devices and la...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/20H01L21/36C23C14/35C23C14/58C23C14/30C23C14/08
CPCC23C14/086C23C14/30C23C14/35C23C14/5806C23C14/5853
Inventor 沈燕
Owner 山东济清科技服务有限公司
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