Automatic focusing microscope system

A microscope system and autofocus technology, applied in the optical field, can solve problems such as false autofocus, achieve precise focusing, and overcome the effects of low focusing accuracy

Active Publication Date: 2018-10-12
HEFEI UNIV OF TECH
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Problems solved by technology

In the above-mentioned autofocus method using laser triangulation, after the spot is projected onto the surface of the measured object, if the spot is projected onto a defect or hole in the measured object, the spot will fall into the defect or hole, causing the observed spot size to be smaller than the actual spot size, so there is a false peak when judging the size of the spot, which leads to wrong autofocus

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  • Automatic focusing microscope system
  • Automatic focusing microscope system
  • Automatic focusing microscope system

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Embodiment Construction

[0043]In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0044] An autofocus microscope system such as figure 1 As shown, the autofocus microscope system is used to observe the measured object 106, and the autofocus microscope system includes a barrel lens 104, an objective lens 105, a mask plate 102, a first light source 101, a first light splitting element 103, a second The light splitting element 107...

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Abstract

The embodiment of the invention provides an automatic focusing microscope system. The automatic focusing microscope system includes a tube lens, an object lens, a mask plate and a processor. The automatic focusing microscope system is characterized in that the pattern of the mask plate is projected to a tested object, then performing automatic focusing by means of the pattern of the mask plate, can perform accurate focusing on the transparent tested object, and can overcome the defect that the focusing accuracy is not high because of holes or defects by using the pattern of the mask plate to perform focusing. The automatic focusing microscope system uses the processor to determine the contrast of the acquired pattern of the mask plate, and then uses the contrast to determine the distance between the object lens and the tested object, thus realizing automatic focusing of the tested object by the automatic focusing microscope system and improving the focusing efficiency.

Description

technical field [0001] The invention relates to the field of optics, in particular to an autofocus microscope system. Background technique [0002] When using a microscope to observe the measured object, it can clearly observe the subtle parts of the measured object and provide reliable data for the observation. Therefore, the microscope plays a pivotal role in the field where fine observation is required. Before using the microscope to observe the measured object, it is first necessary to focus the microscope and the measured object, and then use the focused microscope to observe the measured object more clearly and accurately. [0003] In the prior art, focusing is generally performed manually or automatically. The manual focusing method has the defects of low efficiency and low accuracy. The automatic focusing method using a microscope can improve the focusing efficiency, but when the measured object is a transparent object , When there are defects on the surface of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/24G02B7/28
CPCG02B7/28G02B21/244
Inventor 王永红刘璐闫佩正但西佐胡慧然
Owner HEFEI UNIV OF TECH
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