Rotary objective table for multi-station precise operation, and control method
A rotating stage and multi-station technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc. Affect the movement and positioning accuracy, and the processing accuracy is extremely high, so as to achieve the effect of improving output performance, convenient control, and stable operation
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[0038] Refer to the attached Figures 1 to 9 The rotating stage and the control method for multi-station precision operation of the present invention are described in detail.
[0039]The multi-station precision operation-oriented rotary stage and the control method of the present invention belong to the field of precision operations, can be applied to the rotation positioning of multi-station precision operations, and can be used for precision optics, precision machining, micro-operation, micro-clamping, Micro-mechanical properties testing and other fields. The rotating stage includes: a fixing mechanism, a moving mechanism and a loading plane 11 . The moving mechanism is assembled in the fixing mechanism through clearance fit, and the fixing mechanism is provided with a plurality of piezoelectric stack driving units 30, and the plurality of piezoelectric stack driving units 30 generate axial displacement after being energized to drive the moving mechanism Rotating, the carr...
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